Project Integrator Metrology

Research & development

Computer science & software engineering

In a nutshell


Veldhoven, Netherlands


Research & development

Job Category

Computer science & software engineering



Job ID: J-00270629-216

Introduction to the job

Do you enjoy engaging with a variety of teams of talented professionals within metrology with SW and functional background and being in the lead to create and execute integration plans for new products?

Would you like to be part of the introduction of the latest EUV systems? If so, then a job of Integrator at ASML could be the perfect next step in your career.

Job Mission:

Metrology creates mathematical models describing the lithography machine and its imperfections. The parameters of these models are calibrated using several sensors present in the machine. The calibrations of the machine can be done offline in a dedicated calibration test, or inline while running production. Afterwards, the calibrated parameters are used to control the machine in such a manner that the inaccuracies are corrected.

Metrology solutions incorporate systems design concerns that cover the spectrum from development, realization, integration, manufacturing, installation, to field and factory support.

As integrator, you will play a central role in guarding the integration process and ensuring that the EUV Metrology Expose solutions (Image Alignment, Image Quality and Grid/SPM) are integrated, qualified and released in time to the software releases that run on state-of-the-art lithography tools.

Context of the position:

The position is in EUV Metrology Expose which is part of the MX cluster within the development and engineering sector of ASML.

Role and responsibilities

  • Create, maintain and execute integration plan (by communication with teams)
  • Represent the teams externally and ensure good alignment across a large network of stakeholders (e.g. System Integration, System Engineering, Architects, PL, PO)
  • Coordinate the integration issues solving process coming from proto integration, factory and CS
  • Organize metrology integration and qualification on proto systems
  • Review test specifications, summarize and communicate test plans
  • On behalf of the project, maintain claims for test time needed on prototypes
  • Improve continuous integration
  • Clearly communicate status updates to different stakeholders (projects, release integrators)
  • Contribute to making the whole process more efficient (for example, by automating it).
  • Give direction to the engineers about the next steps in the integration and help them when decisions need to be made.

Education and experience


  • MSc, PDEng or PhD in Mathematics, Physics, or Computer Science


  • At least five years of development experience in a technical product development context is required.
  • Understanding and experience with software development teams, but also with system engineering (HW) is a pre.
  • Experience with mathematical modeling and MatLab, and experience in a technical product development are also a pre


Working at the cutting edge of tech, you’ll always have new challenges and new problems to solve – and working together is the only way to do that. You won’t work in a silo. Instead, you’ll be part of a creative, dynamic work environment where you’ll collaborate with supportive colleagues. There is always space for creative and unique points of view. You’ll have the flexibility and trust to choose how best to tackle tasks and solve problems.
To thrive in this job, you’ll need the following skills:

  • Excellent stakeholder management and coordination skills
  • Good overview of content & inter-relation between deliverables,
  • Flexible and able to adapt plans to sudden requests and changes, practical, with critical focus and attention to details.
  • Good degree of autonomy.
  • Independent decision making is desirable in combination with a cautious approach to choices that may have critical consequences.
  • Transparent on the progress of the integration

Diversity & Inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

Other information


  • You ensure that the SW delivery in the machine works optimally and that your team knows how to realize this at the right moment.
  • We are not looking for DevOps or SW Integrator. But someone who knows how to plan complex integrations and what those entails (testing, quality, delivery, monitoring, resolve issues, requirements etc.)
  • Making sure future problems are being tackled.
  • Experience with QuickScan machines is a big plus.

Keywords:Mathematics, Physics, Electronics, Metrology, Sensors, Modeling, Calibrating, MATLAB, configuration management, computer science, lithography

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