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Physics Internship: Interaction of EUV with Thin Films

Research & development


Mechanical engineering

Chemistry & materials science

In a nutshell


Veldhoven, Netherlands


Research & development

Work Experience

No experience (Student)

Job Category

Physics, Mechanical engineering, Chemistry & materials science

Job ID: J-00273170-905


Are you a Master student in the direction of Theoretical or Applied Physics, Mechanical Engineering or Materials Science? Are you interested in investigating the interaction mechanism of EUV photons with the substrate material? Then this internship might be interesting for you!

Background information

Lithography is one of the important process steps in microchip manufacturing. ASML brings the state of the art lithography machine that uses Extreme Ultraviolet (EUV) light to create patterns as small as few tens of nanometers in size. We design, develop, integrate, market and service these advanced machines, which enable our customers - the world’s leading chipmakers - to reduce the size and increase the functionality of their microchips, which in turn leads to smaller, more powerful consumer electronics.

At ASML-Research, we have recently found a novel method to perform advanced lithography that requires an unprecedented understanding of the interaction mechanism of EUV photons with the substrate. We are looking for talented and motivated master students to investigate this using fundamental computational methods.

Your assignment

The aim of the project is to investigate the interaction mechanism of EUV photons with the substrate material. The student will look for methods to enhance and quantify the secondary electron emission from the substrate irradiated with EUV.

The intern will start by building on to an existing Monte-Carlo based electron-scatter model and add the additional interaction mechanisms needed to capture the novel lithography process. Finally, the model needs to be validated using experimental/literature data.

Your profile

To be a perfect match with this internship, you:

  • You have sufficient programming skills;
  • You are able to take the leadership.

This is a apprentice or graduation internship for Master students, with a minimum duration of 6 months, 5 days per week, starting as soon as possible.
Please note that we can only consider students who are enrolled at a school for the entire duration of the internship.

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

Other information

Change the world – one nanometer at a time
Become an intern at a Dutch company that’s a global industry leader. You’ll gain valuable experience in a highly innovative environment – one that sparks your imagination and creativity. In addition to a monthly internship allowance of maximum €600 (plus a possible housing and free public transport), you’ll get practical guidance from experts in the field and the chance to work in and experience a dynamic team environment.

ASML: be part of progress
ASML is a high-tech company headquartered in the Netherlands. We manufacture the complex lithography machines that chipmakers use to produce integrated circuits, or computer chips. What we do is at the heart of all the electronic devices that keep us informed, entertained and connected. Every day, you use electronics that simply wouldn’t exist without our machines.

Behind ASML’s innovations are engineers who think ahead. The people who work at our company include some of the most creative minds in physics, electrical engineering, mathematics, chemistry, mechatronics, optics, mechanical engineering, and computer science and software engineering.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard.

Students: getting ready for real-world R&D
We’re a global team of about 28,000 people of 120 different nationalities and counting. Headquartered in Europe’s top tech hub, the Brainport Eindhoven region in the Netherlands, our operations are spread across Europe, Asia and the US.

In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country – or even working for a different company.

An internship at ASML is the opportunity to get to know not only the world of industrial-strength R&D, but yourself – you’ll discover just what excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?
How will you be part of progress?


Learn more about this job