Chemistry Graduation Internship: Characterization of particles from wear of polymeric parts

Research & development

Chemistry & materials science


Mechanical engineering

In a nutshell


Veldhoven, Netherlands


Research & development

Work Experience

No experience (Student)

Job Category

Chemistry & materials science, Physics, Mechanical engineering

Published: 21 days ago Job ID: J-00266054-262


Are you a student with a background in Chemistry, Physics, Materials Science or Mechanical Engineering? Do you have knowledge of polymers and polymer manufacturing? Do you have an analytical approach and are you a self-starter? Then this internship might be interesting for you!

Background information

Wafer Defectivity in EUV is one of the major yield detractors for our customers. The particles found on the front side of the wafer are characterized by SEM/EDX at the customer sites. As SEM/EDX is an elemental analysis, it is a major challenge to assign polymeric particles to parts in the bottom cluster module for root cause analysis. Since these particles are generated mostly by wear, the morphology of the particles could also play a role in the assignment of root causes. Identification would be facilitated if a catalogue of particles from known polymeric parts characterized with SEM/EDX was in place. This assignment is to prepare this catalogue.

Your assignment

This assignment consists of two parts:

The first part is to identify the relevant wear mechanisms and propose how to replicate these offline on material samples. Initial suggestions are diamond pin scratching after nitrogen freeze, pin on disc wear, or simple contact pressing against a hard surface.

The proposal has then to be executed in the cleanroom where the candidate is expected to carry out the following activities:

  1. Generate particles via the proposed methods using relevant material samples.
  2. Characterize the particles generated using metrology tools such as SEM/EDX and microscopy

The second part of the assignment will be the preparation of the particle catalogue and will include the following activities:

  1. Validate the offline particle generation methods by comparing the particles generated for each polymeric part to those from the field data known issues.
  2. Comment on the best fit, the best particle generation methodology and as a consequence, the possible wear mechanism in the EUV system.

Your profile

To be the perfect match for this internship, you:

  • are a master's student with a background in Chemistry, Physics, Materials Science or Mechanical Engineering;
  • have knowledge of polymers, polymer manufacturing, wear mechanisms or tribology;
  • have an analytical approach and are a self-starter;
  • have great communication skills in English, both written and verbally.

This is a graduation internship for master students, with a minimum duration of 9 months, 5 days per week. The start date is as soon as possible.

Please note that we can only consider students who are enrolled at a school for the entire duration of the internship.

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

Other information

What ASML offers
Your internship will be in one of the leading Dutch corporations, gaining valuable experience in a highly dynamic environment. You will receive a monthly internship allowance based on your educational level and number of days per week, plus a possible housing and/or travel allowance. More information on the allowances can be found on our website. In addition you will get expert, practical guidance and the chance to work in and experience a dynamic, innovative team environment.

ASML: Be part of progress
We make machines that make chips – the hearts of the devices that keep us informed, entertained and safe; that improve our quality of life and help to tackle the world’s toughest problems.

We build some of the most amazing machines that you will ever see, and the applications to run them. Never satisfied, we measure our performance in units that begin with pico or nano.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard. At ASML we are always pushing technology further.

Students: Getting ready for the real-world
Teamwork is key within ASML. Our R&D team is more than 5,500 people strong and worldwide we form one big team with over 25,000 employees. These colleagues have 123 different nationalities and work at our major sites on three continents.

Dozens of diverse, interdisciplinary teams work in parallel to meet a challenging development schedule. In this inspiring environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country, or even working for a different company.

An internship at ASML is your opportunity to get to know this world and get a feel for that excites you most. Use your education, gain real-life working experience and explore the world of high-tech – all at the same time.

How will you be part of progress?

Learn more about this job