Design engineer mirror heating - Qualification Tool Development

Research & development

Optical engineering


In a nutshell


Veldhoven, Netherlands


Research & development

Work Experience

3-7 years

Job Category

Optical engineering, Physics



Published: 30+ days ago Job ID: J-00261522-673

Introduction to the job

ASML is relentlessly driving the semiconductor industry’s ongoing quest for producing faster, smarter and 
more energy efficient chips. We are a young, dynamic, international and highly skilled workforce creating, 
with strong support of our suppliers, the lithographic tools the industry needs to achieve its goals. 
Are you looking for a challenge to design, test, integrate and troubleshoot a state-of-the-art optical module?

Then you will enjoy this position in the EUV optical column projection team. You will be part of the EUV 
projection group responsible to transfer and de-magnify the reticle image onto the wafer in the EUV 
scanners by means of advanced optical manipulations and corrections. 

Role and responsibilities

As optics design engineer in the EUV Projection group you will be responsible for the design, integration, 
qualification and troubleshooting of the optical performance in the projection modules in the EUV scanners.
You will work in a fast paced and multi-disciplinary environment as part of a project team. 
Besides the technical aspects of the design also has aspects related to costs, reliability, availability and 

Your responsibility is to take ownership of a project deliverable and drive that towards 
completion. This includes documentation, specification, qualification & integration as well as issue handling 
and supporting customer specific requests. In order to fulfill this role, you need to align within in the team on 
technical aspects, scope, planning and progress. Also, you need to collaborate with different competences 
and sectors (systems engineering, marketing and customer support) within ASML. Using your technical 
knowledge, analytical thinking and people skills, you will work closely together with the project team and 
interfacing projects and sectors.

You are part of a team of optical performance engineers who work together on projection optics solutions. 
The job consists of:

• Functional development of calibration, qualification and diagnostic tooling for the projection optics and mirror heatingperformance
• Contribute, in a team, to the development of optical performance qualification tooling for the EUV projection modules.
• Specify, design, support implementation, qualify and integrate those solutions.
• Contribute to troubleshooting and solving issues, This involves analyzing data, connecting the results to physical phenomena such as lens heating, mirror vibrations, etc., and steer towards the proper solution directions.
• Contribute to generation and maintenance of proof book data and machine performance overviews.
• Working in a multi-disciplinary project and collaborate with supplier, factory and customer support teams.

Education and experience

MSc or PhD in engineering or physics, preferably with knowledge of complex systems.
You need a strong background in scientific software programming such as MATLAB Simulink, Python.

Experience with working in teams in a multi-disciplinary environment is needed.
3 to 7 years of work experience in an industrial environment.


Working at the cutting edge of tech, you’ll always have new challenges and new problems to solve – and working together is the only way to do that. You won’t work in a silo. Instead, you’ll be part of a creative, dynamic work environment where you’ll collaborate with supportive colleagues. There is always space for creative and unique points of view. You’ll have the flexibility and trust to choose how best to tackle tasks and solve problems.
To thrive in this job, you’ll need the following skills:

• Committed to deliver functionality within a complex system and drive the quality
• Strong analytic mindset, data driven; experience on developing optical systems is preferred.
• Excellent communicational skills: ability to switch between complex matters and high-level conclusions, ability to convey these in an understandable fashion.
• Team player, can recognize strengths in a highly talented team, and also build a network within ASML.

Diversity & Inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

Other information

Within ASML, the Sector Development and Engineering (D&E) is responsible for the planning, development, 
and delivery of integrated solutions that meet business requirements. This responsibility also includes the 
specification of trade-offs across sectors.

The department DE EUV Optical Column is responsible for delivery of the projection, illumination, dose 
control, and EUV light collection functions for the EUV machines. The department develops technical 
solutions, means and methods and competences to ensure these deliveries in all the different product 

The holder of this position is reporting to the ED EUV DE OC Projection Group Leader. 

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