Mathematics Internship: Characterization of system transfer functions for improved metrology

Interns and Trainees

In a nutshell


Veldhoven, Netherlands


Interns and Trainees

Work Experience

0-1 year

Educational Background

Mathematics, Mechanical Engineering, Electrical Engineering

Remote Work


Time Type

Full time

Job ID: J-00276615


Are you studying Physics, Mathematics, or Computer Science? Are you a team-player with an interest in metrology systems? Then this internship could be interesting for you!

Background information

In the ASML factory there is a constant drive for reducing cycle time for setting up EUV scanner. In this context, it needs to be investigated if the current version of the EUV metrology calibration sequence can be reduced further. We intend to do so by creating one calibration step that will combine several calibration processes. 

Metrology combines and processes data from many different parts of the machine. Imaging, overlay, calibration, set-up and corrections for various effects. A distinction is made between the measurement side (the wafer is being measured) - and the exposure side (the wafer is being exposed). The intern will work in the Image Quality group, which does work for the exposure side. Also, interactions with EUV sensors and EUV projection will be needed. 

Your assignment

The calibration sequence makes use of many measurements of the aberrations produced by the projection system. The image quality calibration (IQC) team has invested time to find out if an efficient choice of measurements can reduce the number of measurements, and thus the cycle time. They have found out that this can be done by exploiting the most important behavior of the projection optics and a Design of Experiments layout. As an intern, you will continue the ongoing investigation work, assess performances and propose alternative calibration methods, to enable faster calibration of the EUV projection optical system.

Assignment is divided in three stages:

1. Familiarize with the calibration process of EUV machines, tooling and calibration proposal of using Principal Component Analysis;

2. Implement Matlab prototype using DoE layout for EUV NXE machines with multiple KPIs optimization;

3. If time permits, propose DOE that can remove biases from NXE measurement system;

Your profile

To be the perfect match for this internship you:

  • Are a bachelor or master student in Physics, Mathematics, or Computer Science;

  • Have good understanding of linear algebra and math;

  • Have good knowledge of Matlab, Python, or Julia;

  • Have good communication and writing skills in English;

This internship suitable for both apprentice and graduation assignments lasting at least 3 months for 5 days per week starting from September 2023.

Please note that we can only consider students who are enrolled at a school for the entire duration of the internship.

This position requires access to U.S. controlled technology, as defined in the United States Export Administration Regulations. Qualified candidates must be legally authorized to access such U.S. controlled technology prior to beginning work. Business demands may require ASML to proceed with applicants who are immediately eligible to access U.S. controlled technology.

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.  

Other information

Change the world – one nanometer at a time

Become an intern at a Dutch company that’s a global industry leader. You’ll gain valuable experience in a highly innovative environment – one that sparks your imagination and creativity. In addition to a monthly internship allowance of maximum €600 (plus a possible housing and/or travel allowance), you’ll get practical guidance from experts in the field and the chance to work in and experience a dynamic team environment.

ASML: be part of progress

ASML is a high-tech company headquartered in the Netherlands. We manufacture the complex lithography machines that chipmakers use to produce integrated circuits, or computer chips. What we do is at the heart of all the electronic devices that keep us informed, entertained and connected. Every day, you use electronics that simply wouldn’t exist without our machines.

Behind ASML’s innovations are engineers who think ahead. The people who work at our company include some of the most creative minds in physics, electrical engineering, mathematics, chemistry, mechatronics, optics, mechanical engineering, and computer science and software engineering.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard.

Students: getting ready for real-world R&D

We’re a global team of about 29,000 people of 120 different nationalities and counting. Headquartered in Europe’s top tech hub, the Brainport Eindhoven region in the Netherlands, our operations are spread across Europe, Asia and the US.

In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country – or even working for a different company.

An internship at ASML is the opportunity to get to know not only the world of industrial-strength R&D, but yourself – you’ll discover just what excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?

How will you be part of progress?


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