Mechanical Engineering | Physics Internship: Development of a 3D FE model for Wafer Clamping

Introduction

Are you a Bachelor or Master student in the direction of Physics or Mechanical Engineering? Do you have strong analytical skills and problem-solving mentality? Then this internship might be interesting for you!

Background Information

This internship will be within the Tables & Clamps Analysis group in D&E. 
As an intern, you will be part of a highly dynamic and multidisciplinary team working on developing, analyzing, qualifying, troubleshooting and improving the Wafer Tables.

In lithography machines, Silicon wafers are clamped in place on special wafer holders (Wafer tables), during exposure using vacuum. The clamped wafer distortion levels affect the final printed pattern quality and therefore customer satisfaction.  As the wafer is being loaded onto the Wafer table, two main interactions impact the wafer distortion: 

1. Wafer loading which requires the flow field under the wafer to be fully coupled with wafer mechanics.

2. Tribological interaction between wafer and the Wafer table surface. 

A 2D axisymmetric finite element model, where all individual physical models are incorporated, has been developed at ASML to estimate wafer distortion. This comes with several shortcomings and limits its usage to sensitivity studies.

To eliminate sources of error, we would like to extend this to a modular 3D model to allow for studying wafer loading and the tribology induced wafer distortions with main challenges being dimensionality (3D) and computation.

Your Assignment

The assignment will be divided into the following incremental steps: 

1. Develop 3D Clampability model using existing 2D axisymmetric model elements. This will include fully-coupled fluid-structure interaction.

2. Validate clampability model with existing experimental data.

3. Extend model capability to include tribological interactions using a reduced scale 3D model of 2" wafer & friction modeling from existing 2D model.

4. Estimate computational cost for full-scale 3D WLG model.

5. Propose optimum strategy and a WoW for parallelization of 3D model using ASML HPC cluster. (with help from COMSOL user group & COMSOL customer support)

6. Prepare summary of benefits & downsides and give recommendations on Way of working.

Your Profile

To be a perfect match with this internship, you:

• Are a Bachelor or Master student in the direction of Physics or Mechanical Engineering;

• Have finite element modeling experience;

• Preferably have COMSOL experience;

• Have experience with MATLAB;

• Are comfortable in approaching experts and arranging support independently;

This is a Bachelor/Master apprentice or graduation internship lasting for 6 or more months for 5 days per week starting as soon as possible.

Please note that we can only consider students who are enrolled at a school for the entire duration of the internship.

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.  

Other information

Change the world – one nanometer at a time
Become an intern at a Dutch company that’s a global industry leader. You’ll gain valuable experience in a highly innovative environment – one that sparks your imagination and creativity. In addition to a monthly internship allowance of maximum €600 (plus a possible housing and/or travel allowance), you’ll get practical guidance from experts in the field and the chance to work in and experience a dynamic team environment.

ASML: be part of progress
ASML is a high-tech company headquartered in the Netherlands. We manufacture the complex lithography machines that chipmakers use to produce integrated circuits, or computer chips. What we do is at the heart of all the electronic devices that keep us informed, entertained and connected. Every day, you use electronics that simply wouldn’t exist without our machines.

Behind ASML’s innovations are engineers who think ahead. The people who work at our company include some of the most creative minds in physics, electrical engineering, mathematics, chemistry, mechatronics, optics, mechanical engineering, and computer science and software engineering.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard.

Students: getting ready for real-world R&D
We’re a global team of about 29,000 people of 120 different nationalities and counting. Headquartered in Europe’s top tech hub, the Brainport Eindhoven region in the Netherlands, our operations are spread across Europe, Asia and the US.

In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country – or even working for a different company.

An internship at ASML is the opportunity to get to know not only the world of industrial-strength R&D, but yourself – you’ll discover just what excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?

How will you be part of progress?

EOE AA M/F/Veteran/Disability

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