Mechatronics Internship (non-thesis): Observer Development for Thermal Transient at Laser Switching

Introduction

Are you studying Electrical, Mechanical, or control engineering? Do you have an affinity for Mechatronics? Then this internship could be interesting for you!

Background information

EUV source is responsible to condition the CO2 laser in the lithographic machine; the laser is of very high power and will be guided through the BTS (Beam Transport System) and FU (Focus Unit) before hitting tin droplets to create EUV light, which is eventually used to expose wafers. Source Mechatronics is responsible to develop and maintain the actuators and corresponding control loops along the BTS and FU.

An ESG (environmental, social, and governance) effort will be to develop methods to reduce the CO2 laser power between wafer exposures to save energy, but the power reduction presents challenges to the BTS--more specifically, the BTS will experience more fluctuating thermal transient due to cooling down of all hardware when the laser is switched off. The thermal transient may cause the laser to be defocused or the beam size to shrink, both of which are undesired for machine performance and safety.
This internship assignment aims to develop models and control methods to accommodate the thermal transient when the CO2 laser is switching between ON and OFF.

Your assignment

Some prior studies have developed a thermal model to predict several parameters, including beam size and beam focus, under power changes. This internship assignment aims to develop an observer or Kalman filter scheme to accompany the thermal model, such that the thermal model can become adaptive in real time and may eliminate the need to calibrate the thermal model machine-by-machine.

A potential extension for this internship assignment will be to adopt the observer in a feedforward control schematic to access its performance to mitigate the impact of the reduced CO2 laser power between wafer exposures.

Your profile

To be the perfect match for this internship you:

• Are a Master student in Electrical, mechanical, or control engineering or mechatronics;

• Have a good command over control theory and Simulink;

• Have programming skills in Matlab;

• Are a proactive person who likes working in a team.

This is a master apprentice internship lasting 3 months, 5 days per week, starting January 2024 

Please note that we can only consider students who are enrolled at a university for the entire duration of the internship.

This position requires access to U.S. controlled technology, as defined in the United States Export Administration Regulations. Qualified candidates must be legally authorized to access such U.S. controlled technology prior to beginning work. Business demands may require ASML to proceed with applicants who are immediately eligible to access U.S. controlled technology.

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.  

Other information

Change the world – one nanometer at a time
Become an intern at a Dutch company that’s a global industry leader. You’ll gain valuable experience in a highly innovative environment – one that sparks your imagination and creativity. In addition to a monthly internship allowance of maximum €600 (plus a possible housing and/or travel allowance), you’ll get practical guidance from experts in the field and the chance to work in and experience a dynamic team environment.

ASML: be part of progress
ASML is a high-tech company headquartered in the Netherlands. We manufacture the complex lithography machines that chipmakers use to produce integrated circuits, or computer chips. What we do is at the heart of all the electronic devices that keep us informed, entertained and connected. Every day, you use electronics that simply wouldn’t exist without our machines.

Behind ASML’s innovations are engineers who think ahead. The people who work at our company include some of the most creative minds in physics, electrical engineering, mathematics, chemistry, mechatronics, optics, mechanical engineering, and computer science and software engineering.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard.

Students: getting ready for real-world R&D
We’re a global team of about 29,000 people of 120 different nationalities and counting. Headquartered in Europe’s top tech hub, the Brainport Eindhoven region in the Netherlands, our operations are spread across Europe, Asia and the US.

In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country – or even working for a different company.

An internship at ASML is the opportunity to get to know not only the world of industrial-strength R&D, but yourself – you’ll discover just what excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?

How will you be part of progress?