Physics | Mathematics Internship: Spectral engineering for optical overlay nanometrology

Interns and Trainees

In a nutshell


Veldhoven, Netherlands


Interns and Trainees

Work Experience

0-1 year

Educational Background


Remote Work


Time Type

Full time

NEW Job ID: J-00274296


Are you a Bachelor or Master graduation student in the direction of Physics or Mathematics? Are you a team player with strong simulation expertise? Would you like to work with ASML's cutting edge technology alongside our research and development experts? Then this internship might be interesting for you! 

Background information

The control of overlay, which is defined as the alignment error between two semiconductor layers, plays a vital role in semiconductor manufacturing. Overlay is often measured optically by detecting the optical response from a metrology target in customer’s wafers. With the continuous shrinkage of the size of a transistor on a chip, overlay accuracy budget becomes increasingly tighter (sub-nanometer). To achieve the optimum overlay metrology performance, multiple wavelengths are often used in the overlay detection

Your assignment

In this assignment, you will investigate new ideas of using multiple wavelengths in overlay optical detection. Methods of using a tailored spectrum to help improving overlay performance against detection imperfections will be investigated both numerically (e.g. performing simulations) and experimentally (e.g. data analysis).

This assignment requires to understand ASML’s state-of-the-art simulation models and data analysis tooling at the level that you are able to modify it. Therefore, physics background with a focus on optics (imaging) and strong skills in programming (MATLAB) are required. The assignment will be carried out within Research project space. You will work at the cutting edge of technology, interact with various experts from ASML Research & Development (R&D), and experience the difference between industry R&D and academia research. 

Your profile

To be a perfect match with this internship, you:

  • Are a Bachelor or Master student in the direction of Physics (optics, photonics, semiconductor) or Mathematics;
  • Have strong simulation expertise (MATLAB) and analytical skills;
  • Have basic understanding of Fourier optics and light-matter interaction, with machine learning experience being a plus; 
  • Are a quick learner and team player that is flexible and result-driven;
  • Have good communication and presentation skills.

This assignment is suitable for a Bachelor or Master graduation internship. The duration of this assignment is at least 6 months, for 5 days per week. The start date is in September 2023.
In order to be eligible for the internship you need to be enrolled as a student at an educational institute during the entire duration.

This position requires access to U.S. controlled technology, as defined in the United States Export Administration Regulations. Qualified candidates must be legally authorized to access such U.S. controlled technology prior to beginning work. Business demands may require ASML to proceed with applicants who are immediately eligible to access U.S. controlled technology.

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.  

Other information

Change the world – one nanometer at a time
Become an intern at a Dutch company that’s a global industry leader. You’ll gain valuable experience in a highly innovative environment – one that sparks your imagination and creativity. In addition to a monthly internship allowance of maximum €600 (plus a possible housing and/or travel coverage), you’ll get practical guidance from experts in the field and the chance to work in and experience a dynamic team environment.

ASML: be part of progress
ASML is a high-tech company headquartered in the Netherlands. We manufacture the complex lithography machines that chipmakers use to produce integrated circuits, or computer chips. What we do is at the heart of all the electronic devices that keep us informed, entertained and connected. Every day, you use electronics that simply wouldn’t exist without our machines.

Behind ASML’s innovations are engineers who think ahead. The people who work at our company include some of the most creative minds in physics, electrical engineering, mathematics, chemistry, mechatronics, optics, mechanical engineering, and computer science and software engineering.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard.

Students: getting ready for real-world R&D
We’re a global team of about 29,000 people of 120 different nationalities and counting. Headquartered in Europe’s top tech hub, the Brainport Eindhoven region in the Netherlands, our operations are spread across Europe, Asia and the US.

In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country – or even working for a different company.

An internship at ASML is the opportunity to get to know not only the world of industrial-strength R&D, but yourself – you’ll discover just what excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?

How will you be part of progress?


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