Physics | Mathematics Internship: Generating software tool(s) and data analysis

Interns and Trainees

In a nutshell


Veldhoven, Netherlands


Interns and Trainees

Work Experience

0-1 year

Educational Background

Physics, Computer Science, Mathematics, Data Science



Programming Language

C++, Python

Remote Work


Time Type

Full time

Job ID: J-00281470


Are you a master student in the direction of Physics, Mathematics, Chemistry or similar? Do you have a affinity to work with computers/software development? Then this internship might be interesting for you!

Background information

Within the defectivity team we try to bring the productivity and customer product yield of our Extreme Ultraviolet (EUV) Scanners to the next level. For this we are looking for students that feel enthused by challenges of solving performance issues in our unique, high-tech EUV systems. Do you get excited by puzzles on nanometer scale and problems of multidisciplinary nature? 
As a intern in our group, you will analyse root causes and develop software solutions for particle contamination challenges at the reticle in EUV scanners. You will formulate and verify hypotheses on the transport and deposition of these particles. This involves the effects of the EUV-plasma, electrostatics around the reticle, and chemical processes in the scanner. You will use observations and data from our scanners for this, as well as experiments and numerical models.

Your assignment

'Thorough analysis of feedback and data of EUV scanners of our customers and/or factory. Use of the analysis as input for root cause finding, to solve problems. In particular, our Defectivity Database will deliver Factory system qualification data as measured with e.g. AMX, Flashscan and Helios
An intern you would: 

  •   Verify correctness of data and demo dashboard
  •   Make dashboards in Spotfire for various internal customers
  •   RCF team - overview of performance of systems and roadmap reporting
  •   EUV factory team - cycle time dashboard with redo rates etc.
  •   Metrology team - dashboard to validate performance of metrology tools like Flashscan, Helios and other equipment
  • These goals are achieved in small, multidisciplinary teams

Your profile

To be a perfect match with this internship, you:

  • are a master student in the direction of Physics, Mathematics, Chemistry or similar.
  • have knowledge of Matlab, Python or similar.
  • have good communication skills in English, both written and verbal.

This is a master apprentice or graduation internship with a duration of 6-12 months, 5 days a week, starting as of October 2023.

Please note that we can only consider students who are enrolled at a university for the entire duration of the internship.

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.  

Other information

Change the world – one nanometer at a time
Become an intern at a Dutch company that’s a global industry leader. You’ll gain valuable experience in a highly innovative environment – one that sparks your imagination and creativity. In addition to a monthly internship allowance of maximum €600 (plus a possible housing and/or travel coverage), you’ll get practical guidance from experts in the field and the chance to work in and experience a dynamic team environment.

ASML: be part of progress
ASML is a high-tech company headquartered in the Netherlands. We manufacture the complex lithography machines that chipmakers use to produce integrated circuits, or computer chips. What we do is at the heart of all the electronic devices that keep us informed, entertained and connected. Every day, you use electronics that simply wouldn’t exist without our machines.

Behind ASML’s innovations are engineers who think ahead. The people who work at our company include some of the most creative minds in physics, electrical engineering, mathematics, chemistry, mechatronics, optics, mechanical engineering, and computer science and software engineering.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard.

Students: getting ready for real-world R&D
We’re a global team of about 29,000 people of 120 different nationalities and counting. Headquartered in Europe’s top tech hub, the Brainport Eindhoven region in the Netherlands, our operations are spread across Europe, Asia and the US.

In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country – or even working for a different company.

An internship at ASML is the opportunity to get to know not only the world of industrial-strength R&D, but yourself – you’ll discover just what excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?

How will you be part of progress?


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