Physics | Mathematics Internship: Linking Diagnostics to Overlay Performance

Interns and Trainees

In a nutshell


Veldhoven, Netherlands


Interns and Trainees

Educational Background

Physics, Mathematics, Data Science, Other technical backgrounds



Remote Work


Time Type

Full time

Job ID: J-00282240


Are you studying Physics or Mathematics? Do you have affinity with data analysis and statistics? Then this internship is interesting for you!

Background Information

The EUV System Performance department is responsible for qualifying the EUV Scanner products on metrics like Imaging - , Overlay - , Focus - and Productivity - Performance. Overlay Performance is the accuracy with which one customer product layer is exposed on top of the previous one. This is done by test protocols where wafers are exposed with markers by a specified sequence. The actual variation in position of those markers is measured giving the Overlay Performance number. One of our challenges is to develop monitoring and diagnosing methodology for Overlay Performance based on continuously tracked signals from the Scanner Hardware. 

Your Assignment

When in production, the ASML scanner generates large amounts of diagnostics data that characterizes its movements, thermal state, and functional behavior. With this data, we are able to link the performance of the system to the machine's expected and measured state. Thereby hoping to find an explanation for atypical performance, leading to new root cause hypotheses.

We are currently lacking a good framework to link all these signals to measured system performance ("overlay"). With a good framework, we should be able to make quick comparisons of "good" systems vs. "bad" systems, and see what diagnostics data can be used to distinguish them. Also, we will be capable of making population overviews of these diagnostics, leading to budget estimates and detailed timing sequence comparison.

In this internship you will do the following:

  • Deliver framework for quick signal analysis (in MATLAB);
  • Create population overview of some of the most relevant signals for overlay;
  • Identify atypical behavior and link to root causes for differences in performance.

Your Profile

To be the perfect match for this internship you:

  • Are studying Physics, Mathematics, or a related field;
  • Have experience with data analysis and statistics;
  • Have programming skills in MATLAB;
  • Are an independent person with good communication skills.

This is a bachelor or master apprentice internship lasting 6 months, with a flexible start date.

Please note that we can only consider students who are enrolled at a school for the entire duration of the internship.

This position requires access to controlled technology, as defined in the Export Administration Regulations (15 C.F.R. § 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with candidates who are immediately eligible to access controlled technology.

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

Other information

ASML: be part of progress

ASML is a high-tech company headquartered in the Netherlands. We manufacture the complex lithography machines that chipmakers use to produce integrated circuits, or computer chips. What we do is at the heart of all the electronic devices that keep us informed, entertained and connected. Every day, you use electronics that simply wouldn’t exist without our machines.

Behind ASML’s innovations are engineers who think ahead. The people who work at our company include some of the most creative minds in physics, electrical engineering, mathematics, chemistry, mechatronics, optics, mechanical engineering, and computer science and software engineering.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard.

Students: getting ready for real-world R&D

We’re a global team of 40,000+ people of 120 different nationalities and counting. Headquartered in Europe’s top tech hub, the Brainport Eindhoven region in the Netherlands, our operations are spread across Europe, Asia and the US.

In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country – or even working for a different company.

An internship at ASML is the opportunity to get to know not only the world of industrial-strength R&D, but yourself – you’ll discover just what excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?

How will you be part of progress?

EOE AA M/F/Veteran/Disability

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