Physics Graduation Internship: New Optical Sensor Concepts

Background Information

ASML produces photolithography scanners performing with nanometer accuracy at a very high speed. This is achieved thanks to several elements: good design, very accurate sensors, and clever algorithms. We constantly seek improvements in all these elements to improve scanner performance. In being part of ASML, your task is to push this boundary of accuracy and speed beyond the current status by exploring new optical sensor designs.

For years, our level sensors have been very successful in measuring wafer thickness variations and generating wafer height maps. These wafer height maps are used for active focusing of the scanner projection optics and are thus critical to a scanner’s performance. In order to make our machines more robust against process dependencies we aim to explore new sensor concepts. 

Your Assignment

You will investigate new optical design concepts for the level sensor and its submodules with the aim to reduce the complexity and cost of the sensor while improving its performance and robustness against process dependencies.

Your Profile

To be the perfect match for this internship:

• You are a Master student in Physics, Optical Engineering or a related field;
• You are keen to learn about optical design, imaging aberration theory, metrology systems, and optical technology;
• Have experience in MATLAB;
• Experience in optical ray tracing programs (e.g. Zemax OpticStudio, Code V, or OSLO) is welcome but not a necessity.

Please provide a motivation letter when applying for this internship. This is a Master graduation internship for 5 days a week with duration of a minimum 9 months.

Please note that we can only consider students who are enrolled at a university for the entire duration of the internship.

This position requires access to U.S. controlled technology, as defined in the United States Export Administration Regulations. Qualified candidates must be legally authorized to access such U.S. controlled technology prior to beginning work. Business demands may require ASML to proceed with applicants who are immediately eligible to access U.S. controlled technology.