Physics Internship (non-thesis): EUV Dose Control Data Analysis and Modeling

Interns and Trainees

In a nutshell


Veldhoven, Netherlands


Interns and Trainees

Educational Background

Physics, Mathematics, Data Science, Other technical backgrounds



Remote Work


Time Type

Full time

Job ID: J-00283016


Do you like working with large data sets and do you have experience in MATLAB? Then this internship will be interesting for you!

Background Information

The functional group of EUV dose control focuses on delivering the requested amount of light for wafer exposure, called dose. Variation of dose will impact imaging performance, causing critical dimension uniformity issue. Dose is determined by a number of contributors throughout the entire optical path, from source to wafer stage. Quantifying each contributor is the first step toward setting budgets in order to meet system specification. Understanding the physics of each contributor and being able to model each key performance indicator is the next step to predict the dose system performance of the future platform and propose system improvement solution. The project requires processing large amount of data, performing modeling and extracting information, which we would like your help.

Your Assignment

Your task is to:

  • Investigate machine data from various scanner modules (such as source, illuminator, reticle stage, projection optics, wafer stage, etc.);
  • Find correlations between the dynamics of each module and the variation of dose;
  • Quantify the impact of error generated by each module to the dose system performance;
  • Build a mathematical model to predict the performance with a given system configuration change;
  • Draw conclusions and suggestions to the system specification based on the budget breakdown.

Your Profile

To be the perfect match for this internship you:

  • Are studying Physics, Mathematics, Data Science, or a related field;
  • Have experience in MATLAB (or Python)
  • Preferably have experience with experimental physics;
  • Are fluent in English, both verbally and in writing.

This is a bachelor or master apprentice internship lasting 4 or more months for 5 days per week, starting as soon as possible.

Please note that we can only consider students who are enrolled at a school for the entire duration of the internship.

This position requires access to controlled technology, as defined in the Export Administration Regulations (15 C.F.R. § 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with candidates who are immediately eligible to access controlled technology.

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

Other information

ASML: be part of progress

ASML is a high-tech company headquartered in the Netherlands. We manufacture the complex lithography machines that chipmakers use to produce integrated circuits, or computer chips. What we do is at the heart of all the electronic devices that keep us informed, entertained and connected. Every day, you use electronics that simply wouldn’t exist without our machines.

Behind ASML’s innovations are engineers who think ahead. The people who work at our company include some of the most creative minds in physics, electrical engineering, mathematics, chemistry, mechatronics, optics, mechanical engineering, and computer science and software engineering.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard.

Students: getting ready for real-world R&D

We’re a global team of 40,000+ people of 120 different nationalities and counting. Headquartered in Europe’s top tech hub, the Brainport Eindhoven region in the Netherlands, our operations are spread across Europe, Asia and the US.

In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country – or even working for a different company.

An internship at ASML is the opportunity to get to know not only the world of industrial-strength R&D, but yourself – you’ll discover just what excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?

How will you be part of progress?

EOE AA M/F/Veteran/Disability

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