Mechanical System Integration Engineer – Fluid and Thermal

In a nutshell


San Diego - CA, US

Published: 24 days ago Job ID: J-00259670-929

Introduction to the job

ASML is one of the world’s leading manufacturers of lithography systems that help enable Moore’s Law and the creation of increasingly powerful and capable electronic devices. Our San Diego-based light source division, Cymer, is renowned for developing both deep ultraviolet (DUV) lithography light sources and next generation extreme ultraviolet (EUV) light sources.We are a multinational company with over 70 locations in 16 countries, headquartered in Veldhoven, the Netherlands.

ASML US, LP brings together the most creative minds in science and technology to develop lithography machines that are key to producing faster, cheaper, more energy-efficient microchips. We design, develop, integrate, market and service these advanced machines, which enable our customers - the world’s leading chipmakers - to reduce the size and increase the functionality of their microchips, which in turn leads to smaller, more powerful consumer electronics. Our headquarters are in Veldhoven, the Netherlands, and we have 18 office locations around the United States including main offices in Wilton, CT, Chandler, AZ, San Jose, CA and San Diego, CA (EUV laser source creation).

As the world’s leading semiconductor lithography machine (the machine that makes computer chips) manufacturer, ASML enables chip manufacturers to make cheaper, faster, chips, thereby enabling all the technology you use today. The machines we make require high speed, magnetically levitated stages with sub-nanometer accuracy, robotic mask delivery systems, mechatronic devices to shape and correct the laser illumination source, and optical modules that can detect sub-nanometer alignment errors and pattern distortions. Temperature controlled to milli-kelvins, particulate free, and operating in complete vacuum, the technical challenges are endless. Solving these requires expertise in servo controls, mechatronics, mechanical engineering, electrical engineering, embedded software engineering, optics, physics, manufacturing, industrialization, and more. If you like extreme challenges and want to help bring the next generation of technology to the world, then come join ASML.

If you have a passion for technology and innovation you’ll want to check us out. Be a part of ASML. Be a part of progress.

One Company, One Goal, Limitless Innovation. It's our people that make the difference.

This position requires access to controlled technology, as defined in the Export Administration Regulations (15 C.F.R. § 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with applicants who are immediately eligible to access controlled technology.

Role and responsibilities

The Mechanical System Integration Engineer will perform a variety of engineering tasks including troubleshooting of complex mechanical, gas, water cooling, and vacuum systems by providing support on San Diego prototype machine and at customer sites. In addition, engineer will develop test plans, perform system integration, data collection, data analysis and write test reports.Engineer will represent Netherlands based projects for the gas and vacuum, fluid and thermal, gas analyzer and tooling in San Diego. Engineer will serve as an interface to the design project based in the Netherlands, Integration in San Diego, and Global Customer Service. The Satellite Team interface between sites is critical to efficient coordination and execution, ensuring upgrades are executed to plan and system availability is maximized.

  • Represent Netherlands development & engineering projects in San Diego.
  • Support project meetings to ensure close alignment to project development activities and escalations.
  • Provide a broad mechanical engineering background to create test plans, secures system test time, and assemble test hardware.
  • Perform validation testing of gas delivery modules, fluid and thermal subassemblies, gas analyzers, vacuum vessels and tooling.
  • Review issue resolution plans, test plans and test reports with internal and external customers.
  • Provide escalation support for prototype systems in San Diego and customer systems worldwide.
  • Interacts closely with development engineers, scientists, suppliers and AQ engineers to resolve quality issues.
  • Receive knowledge transfer from projects on new module and tool releases.
  • Provide knowledge transfer training to Upgrades, Integration, Customer Service and Manufacturing personnel.
  • Audit engineering changes (EC) and associated documentation for planned upgrades in San Diego.
  • Recommend improvements to projects in regard to safety, reliability, availability, manufacturability & serviceability.
  • Travel to domestic and overseas internal & customer sites to receive & provide training, perform upgrades & preventative maintenance tests, and trouble-shoot systems.
  • Work according to safety rules & report near misses and safety issues accurately & immediately.
  • Effectively works & prioritizes activities with minimal supervision or direction.
  • Performs other duties as assigned.

Education and experience

  • Requires a minimum Bachelor’s Degree in mechanical engineering or other related engineering or science.
  • Minimum of 3-5 years of experience is required.
  • Knowledge of mechanical engineering principles.
  • Experience in fluid dynamics, gas systems, vacuum systems, and water cooling.
  • Experience with fluid test equipment and HW like flowmeters, mass flow controllers and pressure valves.
  • Experience in tooling and large industrial equipment a plus.
  • Experience in semiconductor equipment development a plus.
  • Experience with product development through complete product life cycle.
  • Experience with developing, setting up, running, and collecting data from test experiments.
  • Experience translating knowledge & hands-on experience into technical procedures.
  • Experience with Geometric Dimensioning and Tolerancing (GD&T) including analysis of tolerance chains a plus.
  • Experience with 3D solid modelling using Unigraphics/NX desired.
  • Experience with analytical software, including Matlab and Python desired.
  • Experience with common electrical test equipment (multimeter, signal generator, oscilloscope, analog digital converters and digital analog converters)a plus.
  • Experience with MS Word, Powerpoint, Excel


  • Ability to statistically analyze data and effectively report problems through written and/or graphical formats.
  • Ability to develop trouble-shooting guide/action plans.
  • Ability to work either independently or as part of a development team.
  • Ability to self-motivate and work in a fast-moving high-tech environment.
  • Excellent written and verbal communication skills.
  • Excellent inter-personal service skills, with an advanced understanding of customer relationship building in highly multi-cultural environment.
  • Flexibility, when needed, in work schedule including weekend, day and night shifts, and travel to oversees customer sites at short notice (<20%).
  • The employee is required to occasionally support off-hours/on-call phone support for escalation management when needed.

Diversity & Inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

Other information

The EUV source team in San Diego operates in a fast-paced, uniquely innovative, and challenging environment to create new-to-industry solutions with rapid productization to support an aggressive commercialization plan for the EUV technology within ASML.The Integration Satellite Mechanical Satellite Team is responsible for the integration, qualification, and support of the gas delivery systems, fluid and thermal systems, vacuum vessel, high-pressure residual gas analyzer and handling & transportation tooling.The complexity of the EUV source puts exciting and challenging demands on the Mechanical System Integration Engineers who will be engaged in integration and support of the mechanical subassemblies, gas and vacuum systems, fluid and thermal systems and handling & transport tooling.

  • The physical demands described here are representative of those that must be met by an employee to successfully perform the essential functions of this job. Reasonable accommodations may be made to enable individuals with disabilities to perform the essential functions.
  • While performing the duties of this job, the employee routinely is required to sit; walk; talk; hear; use hands to keyboard, finger, handle, and feel; stoop, kneel, crouch, twist, reach, and stretch.
  • The employee is occasionally required to move around the campus.
  • The employee may occasionally lift and/or move up to 50 pounds.
  • May require travel dependent on business needs.
  • Specific vision abilities required by this job include close vision, color vision, peripheral vision, depth perception, and ability to adjust focus.
  • Can work under deadlines.
  • The environment generally is moderate in temperature and noise level.
  • Must be able to read and interpret data, information, and documents.
  • Can observe and respond to people and situations and interact with others encountered in the course of work.
  • Can learn and apply new information or skills.
  • Responsibilities include periodic travel to regional and overseas sites for product technical support and special project support.
  • Work may include onsite technical support involving heavy lifting of equipment & modules.
  • Position will require technical work activity in a clean-room production environment and/or laboratory setting.
  • The environment generally is moderate in temperature and noise level.
  • Occasionally may be exposed to loud noise bursts and may be exposed to toxic gases (fluorine).
  • Must be able to work in small, confined spaces.

We offer competitive salaries and benefits including medical, dental, vision, 401(K), and FSAs.

We are committed to leveraging the diverse backgrounds, perspectives, and experiences of our workforce to create opportunities for our people and the business.

EOE AA M/F/Veteran/Disability

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