Mechatronics Graduation Internship: Modify reference trajectory algorithms

Research & development


In a nutshell


Veldhoven, Netherlands


Research & development

Job Category


Published: 27 days ago Job ID: J-00256437-772


Are you a student with a background in Mechatronics? Do you have an affinity with control systems and MATLAB? Are you proactive and willing to learn? Then this internship might be interesting for you!

Background information

Currently at ASML, the reference trajectory for the scanning motion is smooth profile. Then, the Velocity, Acceleration and Jerk (VAJ) ratios are optimized to select the best machine operating conditions. The downside of this method is that the running process of the VAJ ratios might add more design time and the resonances of the plant are not directly tackled. The later can increase the settling times and reduce positioning accuracy. As a consequence, the scanning performance is deteriorated given that the tracking error takes some time before it reaches steady state.

Your assignment

The current setpoint generation algorithm deteriorates the scanning performance given that the tracking error is different from zero and dependent on the setpoint. The following questions arise:

  1. Can the scanning performance be improved by means of the implementation of a different setpoint generation algorithm?
  2. Can the setpoint be designed in such a way that its frequency content is within the bandwidth of the feedback controller?

New setpoint generation algorithms are available in literature which propose different solutions. Special interest is drawn to the techniques developed by Alper Dumanli on his PhD work. entitled "Active and Passive Control of Machine Tool Vibrations for High Speed and Accuracy". The reason is that these techniques do not require jerk limitations, any pre-filtering or precise identification of structural dynamics. In addition, they do not elongate the machine cycle time, nor deteriorate contouring performance. Furthermore, these techniques where implemented in a 3-axis micro-milling center and the results are remarkable.

The assignment structure is proposed as follows:

  1. Revise the current setpoint generation algorithm employed at ASML and the algorithm proposed in "Active and Passive Control of Machine Tool Vibrations for High Speed and Accuracy"
  2. Investigate how the later algorithm could be implemented in an ASML system. The investigation can be verified with MATLAB Simulink. Note that some Simulink models are already available for this and will be shared with the intern.
  3. If time allows, the work developed by the intern might be implemented in an actual system.

Your profile

To be the perfect match for this internship, you:

  • are a student with a background in Mechatronics;
  • have an affinity with MATLAB and MATLAB Simulink;
  • have great communication skills in English, both verbal and written.

This is a graduation internship for master students, with a minimum duration of 7 months, 5 days per week (flexible). The start date will be in as soon as possible.

Please note that we can only consider students who are enrolled at a school for the entire duration of the internship.
This position requires access to U.S. controlled technology, as defined in the United States Export Administration Regulations. Qualified candidates must be legally authorized to access such U.S. controlled technology prior to beginning work. Business demands may require ASML to proceed with applicants who are immediately eligible to access U.S. controlled technology.

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

Other information

Change the world – one nanometer at a time
Become an intern at a Dutch company that’s a global industry leader. You’ll gain valuable experience in a highly innovative environment – one that sparks your imagination and creativity. In addition to a monthly internship allowance of maximum €600 (plus a possible housing and/or travel allowance), you’ll get practical guidance from experts in the field and the chance to work in and experience a dynamic team environment.

ASML: be part of progress
ASML is a high-tech company headquartered in the Netherlands. We manufacture the complex lithography machines that chipmakers use to produce integrated circuits, or computer chips. What we do is at the heart of all the electronic devices that keep us informed, entertained and connected. Every day, you use electronics that simply wouldn’t exist without our machines.

Behind ASML’s innovations are engineers who think ahead. The people who work at our company include some of the most creative minds in physics, electrical engineering, mathematics, chemistry, mechatronics, optics, mechanical engineering, and computer science and software engineering.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard.

Students: getting ready for real-world R&D
We’re a global team of about 29,000 people of 120 different nationalities and counting. Headquartered in Europe’s top tech hub, the Brainport Eindhoven region in the Netherlands, our operations are spread across Europe, Asia and the US.

In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country – or even working for a different company.

An internship at ASML is the opportunity to get to know not only the world of industrial-strength R&D, but yourself – you’ll discover just what excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?

How will you be part of progress?

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