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Mature Products and Services: Ensuring a long useful life of ASML lithography systems

A well-maintained ASML lithography system has a useful life that is measured in decades. Typically, an ASML lithography system will be used in a leading-edge fab for a large number of years, and then gets a second life with e.g. a manufacturer that makes specialized (“More than Moore”) devices, such as MEMS devices (accelerometers, gyroscopes, silicon microphones, etc.), radio frequency chips, thin-film heads for hard disk drives, or LEDs, to name just a few.

ASML’s Mature Products and Services (MPS) business refurbishes PAS 5500 and TWINSCAN lithography equipment and offers associated services. In refurbishment, a system can be adapted for a particular market, for example by adding front-to-backside alignment for MEMS and through-silicon via (TSV) applications or bowed wafer handling for LED applications. In addition, MPS can perform throughput and overlay enhancements to reduce costs in high-volume manufacturing.

To contact Mature Products and Services, please email mps@asml.com

Page updated on 2017-1-9 15:25 CET

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