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PAS 5500/100D

i-Line Stepper

  • Automated Variable-NA i-Line Projection Lens
  • Completely redesigned variable partial Coherence Illuminator
  • Broadband Field-by-field Focus Leveling System
  • Advanced Light-weight Stage
  • Direct Reticle-Referenced, Through-The-Lens (TTL)
  • Built-In CLASS 1 Laminar Airflow

The PAS 5500/100D i-line stepper is designed for mass production at 0.4 μm and achieves extremely high throughput while maintaining the utmost versatility with its variable Numerical Aperture (NA). This stepper extends i-line’s capability for manufacturing multiple generations of sub-half-micron design rules by optimizing both depth of focus and resolution for critical process layers.

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