AAA | Mobile | Help | 
  • PDF version
  • Printfriendly
  • Add to my favorites
  • Send to a friend
  • Add comments

PAS 5500/100D

i-Line Stepper

  • Automated Variable-NA i-Line Projection Lens
  • Completely redesigned variable partial Coherence Illuminator
  • Broadband Field-by-field Focus Leveling System
  • Advanced Light-weight Stage
  • Direct Reticle-Referenced, Through-The-Lens (TTL)
  • Built-In CLASS 1 Laminar Airflow

The PAS 5500/100D i-line stepper is designed for mass production at 0.4 μm and achieves extremely high throughput while maintaining the utmost versatility with its variable Numerical Aperture (NA). This stepper extends i-line’s capability for manufacturing multiple generations of sub-half-micron design rules by optimizing both depth of focus and resolution for critical process layers.

Home

Annual Report 2016

Annual Report 2016

A look into ASML’s cleanroom

A look into ASML’s cleanroom

Share Information

Year Overview - AEX

asml image
ASML share (15 min. delayed)
AEX:
NASDAQ:

Video Interview: CFO Wolfgang Nickl Q3 Financial Results 2017

Video Interview: CFO Wolfgang Nickl Q3 Financial Results 2017

Shareholder Meeting 2017

Finance

Select calendars:


Company Calendar

Press

ASML customer co-investment program

EUV: Questions and answers

EUV: Questions and answers

Video Interview: CFO Wolfgang Nickl Q3 Financial Results 2017

Video Interview: CFO Wolfgang Nickl Q3 Financial Results 2017

Twitter live

Investors

Annual Report 2016

Annual Report 2016

Investor Day 2016

Investor Day 2016

Share Information

Year Overview - AEX

asml image
ASML share (15 min. delayed)
AEX:
NASDAQ:

Video Interview: CFO Wolfgang Nickl Q3 Financial Results 2017

Video Interview: CFO Wolfgang Nickl Q3 Financial Results 2017

Finance

Finance

ASML customer co-investment program

Select calendars:


Careers Calendar

Careers

Jobs at Cymer

Jobs at Cymer

Select calendars:


Careers Calendar

Twitter live

myPanels

Edit panels