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PAS 5500/275D

High Productivity i-Line Stepper

  • Variable, High-NA i-line Lens
  • Innovative 3.5-kW AERIAL Illuminator
  • Continuously variable partial coherence and annular illumination using AERIAL Optics
  • Software-controlled Lens NA and Illuminator
  • Focused Reticle Masking System
  • Direct Reticle-referenced, Through-The-Lens (TTL) Phase-grating Alignment
  • Advanced High Speed Stage

The PAS 5500/275D is an i-line stepper stretching resolution down to 0.28 μm and beyond. It is built on the success of the proven PAS 5500/250C advanced i-line stepper.
The PAS 5500/275D features improved imaging achieved by applying the latest techniques in lens adjustment as well as improved overlay by including phase modulation in the system. In addition to that, Image Quality Control is included as standard. Leadership productivity is improved to more than 100 wph (ATP settings). The PAS 5500/275D uses an AERIAL illuminator, which provides flexible and automated NA/sigma combinations in both conventional and off-axis illumination modes while maintaining high intensities to enable economical mass production of leading-edge devices.

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