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PAS 5500/450F

i-Line Step-and-Scan

  • Cost-Effective i-Line High Throughput Scanner, Throughput 150 Wafers per Hour
  • Applications
  • High Speed Scanning Stages
  • PAS 5500 Mature Step-and-Scan Body
  • Commonality with PAS 5500 DUV and 193-nm Step-and-Scan Tools for Economic Fab Extensions

The PAS 5500/450F is the latest and most advanced addition to the i-line Step-and-Scan family. This mass production tool is the successor of the PAS 5500/400 for non-critical applications. This tool has been extended to critical i-line down to 220 nm. The PAS 5500/450F combines the imaging power of a variable 0.48-0.65-NA Carl Zeiss Starlith 4X reduction lens with a high speed scanning stage to deliver a high productivity tool with a superior value of ownership for maximum yield.
The system is fully configurable to meet production requirements and offers both ease-of-manufacturing and cost-effectiveness in a high-volume production environment. The PAS 5500/450F continues to raise the bar for imaging performance and productivity in the 200-mm litho market.

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