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PAS 5500/750F

DUV Step and Scan

  • Variable, 0.7 NA Deep UV Projection Lens
  • Step and Scan
  • AERIAL II Illumination with QUASAR and Optional Multiple Exposure Capability
  • PAS 5500 Step-and-Scan Body
  • 8-Spot Level Sensor
  • ATHENA Advanced Alignment
  • Includes 2kHz 20W KrF Laser Technology with VariableLaser Frequency Control

The PAS 5500/750F DUV Step-and-Scan system enables 130-nm mass production using mature 248-nm KrF technology. It combines the imaging power of the improved 0.7 NA 4x reduction lens with the latest multi-spot innovations in the leveling system and the AERIAL II illumination technology including QUASAR, multipole illumination and optional multiple exposure capability. The system is equipped with both TTL alignment and ATHENA for improved alignment accuracy on backend process layers, providing a long term single machine overlay of less than 25 nm.

Further reduction of overhead times in combination with enhancements in productivity on customer jobs provide a production throughput of 130 200-mm wph.
The application of a 2 kHz 20W KrF laser with Variable laser Frequency Control results in the lowest possible Cost of Operation.

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Video Interview: CFO Roger Dassen Q3 Financial Results 2018

Video Interview: CFO Roger Dassen Q3 Financial Results 2018

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Annual Report 2017

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EUV: Questions and answers

EUV: Questions and answers

Video Interview: CFO Roger Dassen Q3 Financial Results 2018

Video Interview: CFO Roger Dassen Q3 Financial Results 2018

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Investor Day 2018

Investor Day 2018

Finance

Finance

Share Information

Year Overview - AEX

asml image
ASML share (15 min. delayed)
AEX:
NASDAQ:

Video Interview: CFO Roger Dassen Q3 Financial Results 2018

Video Interview: CFO Roger Dassen Q3 Financial Results 2018

Annual Report 2017

Annual Report 2017

ASML customer co-investment program

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Jobs in San Diego

Jobs in San Diego

Our most recent vacancies are posted here on ASML.com.

Until the end of 2018, you will still find some San Diego jobs on our old careers site cymercareers.com.

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