AAA | Mobile | Help | 
  • PDF version
  • Printfriendly
  • Add to my favorites
  • Send to a friend
  • Add comments

PAS 5500/8TFH-A

  • SmartStart
  • Proven AlTiC Wafer Handling
  • KrF Starlith 870 Projection Lens with Variable NA Up to 0.80
  • UNICOM, ADE
  • IOSc-4
  • PAS 5500 Step-and-Scan Body
  • Multiple Exposure Technique

The PAS 5500/8TFH-A KrF Step-and-Scan system is a dedicated lithography tool for thin-film head (TFH) production on 125-mm, 150-mm, and 200-mm AlTiC wafers.
It combines a powerful, variable NA up to 0.8 lens with the proven thick AlTiC wafer handling of a PAS body and specific alignment improvements for the TFH environment.
The result is a new standard for TFH production at current and future technology nodes.

TFH manufacturing involves printing sub-100-nm isolated features, which demands extremely low lens aberration levels. The PAS 5500/8TFH-A uses the proven ultra-low aberration KrF lens from the XT platform on the PAS body, ensuring excellent performance and a low cost of ownership. The low thermal conductivity of AlTiC wafers means maximum throughput on the track is restricted, allowing the PAS 5500/8TFH-A more time for alignment and wafer stabilization. In addition, the PAS 5500/8TFH-A features further improvements to the dynamics.
Together, these translate into industry-leading overlay and stitching performance on AlTiC wafers.

Home

Annual Report 2016

Annual Report 2016

A look into ASML’s cleanroom

A look into ASML’s cleanroom

Share Information

Year Overview - AEX

asml image
ASML share (15 min. delayed)
AEX:
NASDAQ:

Video Interview: CFO Wolfgang Nickl Q3 Financial Results 2017

Video Interview: CFO Wolfgang Nickl Q3 Financial Results 2017

Shareholder Meeting 2017

Finance

Select calendars:


Company Calendar

Press

ASML customer co-investment program

EUV: Questions and answers

EUV: Questions and answers

Video Interview: CFO Wolfgang Nickl Q3 Financial Results 2017

Video Interview: CFO Wolfgang Nickl Q3 Financial Results 2017

Twitter live

Investors

Annual Report 2016

Annual Report 2016

Investor Day 2016

Investor Day 2016

Share Information

Year Overview - AEX

asml image
ASML share (15 min. delayed)
AEX:
NASDAQ:

Video Interview: CFO Wolfgang Nickl Q3 Financial Results 2017

Video Interview: CFO Wolfgang Nickl Q3 Financial Results 2017

Finance

Finance

ASML customer co-investment program

Select calendars:


Careers Calendar

Careers

Jobs at Cymer

Jobs at Cymer

Select calendars:


Careers Calendar

Twitter live

myPanels

Edit panels