AAA | Mobile | Help | 
  • PDF version
  • Printfriendly
  • Add to my favorites
  • Send to a friend
  • Add comments

PAS 5500/8TFH-A

  • SmartStart
  • Proven AlTiC Wafer Handling
  • KrF Starlith 870 Projection Lens with Variable NA Up to 0.80
  • UNICOM, ADE
  • IOSc-4
  • PAS 5500 Step-and-Scan Body
  • Multiple Exposure Technique

The PAS 5500/8TFH-A KrF Step-and-Scan system is a dedicated lithography tool for thin-film head (TFH) production on 125-mm, 150-mm, and 200-mm AlTiC wafers.
It combines a powerful, variable NA up to 0.8 lens with the proven thick AlTiC wafer handling of a PAS body and specific alignment improvements for the TFH environment.
The result is a new standard for TFH production at current and future technology nodes.

TFH manufacturing involves printing sub-100-nm isolated features, which demands extremely low lens aberration levels. The PAS 5500/8TFH-A uses the proven ultra-low aberration KrF lens from the XT platform on the PAS body, ensuring excellent performance and a low cost of ownership. The low thermal conductivity of AlTiC wafers means maximum throughput on the track is restricted, allowing the PAS 5500/8TFH-A more time for alignment and wafer stabilization. In addition, the PAS 5500/8TFH-A features further improvements to the dynamics.
Together, these translate into industry-leading overlay and stitching performance on AlTiC wafers.

Home

Q3 Financial Results 2018

Q3 Financial Results 2018

ASML Holding N.V. will announce its 2018 Third Quarter Financial Results on Wednesday, October 17, 2018.

Read More

Video Interview: CEO Peter Wennink Q2 Financial Results 2018

Video Interview: CEO Peter Wennink Q2 Financial Results 2018

Shareholder Meeting 2018

Finance

A look into ASML’s cleanroom

A look into ASML’s cleanroom

Share Information

Year Overview - AEX

asml image
ASML share (15 min. delayed)
AEX:
NASDAQ:

Our Stories

ASML sets GUINNESS WORLD RECORDS™ title for the Smallest advertisement
ASML’s lithography machines are used to create microchips on the nanometer scale (that’s a millionth of a millimeter), which in turn enables electronic devices to become cheaper, faster and more…
20 years of EUV lithography innovation acknowledged by European Patent Office
The European Patent Office (EPO) recently recognized the groundbreaking R&D undertaken by ASML and its partners over the past 20 years. This article reflects on some of the most notable highlights…
All our stories

Annual Report 2017

Annual Report 2017

Select calendars:


Company Calendar

Press

Q3 Financial Results 2018

Q3 Financial Results 2018

ASML Holding N.V. will announce its 2018 Third Quarter Financial Results on Wednesday, October 17, 2018.

Read More

Video Interview: CEO Peter Wennink Q2 Financial Results 2018

Video Interview: CEO Peter Wennink Q2 Financial Results 2018

Twitter live

ASML customer co-investment program

EUV: Questions and answers

EUV: Questions and answers

Investors

Q3 Financial Results 2018

Q3 Financial Results 2018

ASML Holding N.V. will announce its 2018 Third Quarter Financial Results on Wednesday, October 17, 2018.

Read More

Video Interview: CEO Peter Wennink Q2 Financial Results 2018

Video Interview: CEO Peter Wennink Q2 Financial Results 2018

Finance

Finance

Share Information

Year Overview - AEX

asml image
ASML share (15 min. delayed)
AEX:
NASDAQ:

Annual Report 2017

Annual Report 2017

ASML customer co-investment program

Select calendars:


Careers Calendar

Careers

Select calendars:


Careers Calendar

Twitter live

Jobs in San Diego

Jobs in San Diego

Our most recent vacancies are posted here on ASML.com.

Until the end of 2018, you will still find some San Diego jobs on our old careers site cymercareers.com.

myPanels

Edit panels