AAA | Mobile | Help | 
  • PDF version
  • Printfriendly
  • Add to my favorites
  • Send to a friend
  • Add comments

TWINSCAN NXT:1980Di

193-nm Step and Scan

  • Vastly Improved Overlay Performance
  • Vastly Improved Focus Performance
  • 1.35-NA 193-nm Catadioptric Projection Lens
  • FlexRay Prepared Illuminator for Maximum Flexibility
  • In-Situ Metrology per wafer exposure
  • Increased Productivity and Reduced Defectivity
  • Focus Spot Monitoring and Cleaning
  • Litho-Cell Stability and Performance Control
  • Computing platform

The TWINSCAN NXT:1980Di Step-and-Scan system is a high-productivity, dual-stage immersion lithography tool designed for volume production 300-mm wafers at the sub 10-nm node.

The TWINSCAN NXT:1980Di is equipped with the successful in-line catadioptric lens design, having a numerical aperture (NA) of 1.35 – the highest in the industry.

In-situ measurement and correction of optic aberrations enable maximum imaging performance for each wafer exposed when imaging at very low-k1.

Advanced in-situ metrology per wafer together with a comprehensive set of options to input off-line metrology data to the scanner enable maximum overlay, focus and CDU performance on product wafers.

By combining high productivity and excellent image resolution with unprecedented overlay and focus performance, the TWINSCAN NXT:1980Di addresses multiple patterning requirements and thus provides a cost-effective solution for the sub 10-nm nodes.

Home

Annual Report 2016

Annual Report 2016

A look into ASML’s cleanroom

A look into ASML’s cleanroom

Share Information

Year Overview - AEX

asml image
ASML share (15 min. delayed)
AEX:
NASDAQ:

Video Interview: CFO Wolfgang Nickl Q3 Financial Results 2017

Video Interview: CFO Wolfgang Nickl Q3 Financial Results 2017

Shareholder Meeting 2017

Finance

Select calendars:


Company Calendar

Press

ASML customer co-investment program

EUV: Questions and answers

EUV: Questions and answers

Video Interview: CFO Wolfgang Nickl Q3 Financial Results 2017

Video Interview: CFO Wolfgang Nickl Q3 Financial Results 2017

Twitter live

Investors

Annual Report 2016

Annual Report 2016

Investor Day 2016

Investor Day 2016

Share Information

Year Overview - AEX

asml image
ASML share (15 min. delayed)
AEX:
NASDAQ:

Video Interview: CFO Wolfgang Nickl Q3 Financial Results 2017

Video Interview: CFO Wolfgang Nickl Q3 Financial Results 2017

Finance

Finance

ASML customer co-investment program

Select calendars:


Careers Calendar

Careers

James Liu, System Install Engineer

James Liu, System Install Engineer

careervideo

careervideo

Read More

Select calendars:


Careers Calendar

Twitter live

Corporate culture

Corporate culture

ASML “創新導向”文化:不斷征服挑戰並維持技術領先優勢。
Corporate Culture

Jobs at Cymer

Jobs at Cymer

myPanels

Edit panels