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TWINSCAN XT:1460K

193-nm Step and Scan

  • Variable 0.93-NA 193-nm Projection Lens With Advanced Lens Manipulators
  • Ultra-k1 Package
  • Superior Overlay
  • High-Speed Dual-Stage Technology

The TWINSCAN XT:1460K 193-nm Step-and-Scan system is a high-productivity, dual-stage ArF lithography tool designed for volume 300-mm wafer production at 65-nm resolution. The TWINSCAN XT:1460K system combines the imaging power of a variable 0.65–0.93-NA Carl Zeiss Starlith 4X reduction lens with AERIAL-P illuminator technology, extending ArF technology beyond the 65-nm technology node. The dual wafer-stage technology of the TWINSCAN platform enables the exposure of one wafer and the alignment of the next wafer to take place in parallel, virtually eliminating overhead time and allowing for continuous patterning of wafers for maximum productivity. The off-line leveling system guarantees superior focus control over the full wafer, including edge dies. A standardly delivered 45-W ArF laser with variable frequency control, in combination with the high optical transmission of the complete system, provides a production throughput of 205 wph (300 mm). The tool is prepared to operate at extreme low-k1 values, delivering excellent CD uniformity, industry leading overlay and long term performance stability.

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Q4 and FY Financial Results 2018

Q4 and FY Financial Results 2018

ASML Holding N.V. will announce its 2018 Fourth Quarter and Full Year Financial Results on Wednesday, January 23, 2019.

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Video Interview: CFO Roger Dassen Q3 Financial Results 2018

Video Interview: CFO Roger Dassen Q3 Financial Results 2018

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Annual Report 2017

Annual Report 2017

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Investor Day 2018

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A look into ASML’s cleanroom

A look into ASML’s cleanroom

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Q4 and FY Financial Results 2018

Q4 and FY Financial Results 2018

ASML Holding N.V. will announce its 2018 Fourth Quarter and Full Year Financial Results on Wednesday, January 23, 2019.

Read More

Video Interview: CFO Roger Dassen Q3 Financial Results 2018

Video Interview: CFO Roger Dassen Q3 Financial Results 2018

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ASML customer co-investment program

EUV: Questions and answers

EUV: Questions and answers

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Q4 and FY Financial Results 2018

Q4 and FY Financial Results 2018

ASML Holding N.V. will announce its 2018 Fourth Quarter and Full Year Financial Results on Wednesday, January 23, 2019.

Read More

Video Interview: CFO Roger Dassen Q3 Financial Results 2018

Video Interview: CFO Roger Dassen Q3 Financial Results 2018

Annual Report 2017

Annual Report 2017

ASML customer co-investment program

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Careers Calendar

Investor Day 2018

Investor Day 2018

Finance

Finance

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Year Overview - AEX

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ASML share (15 min. delayed)
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세계에 나가 다양한 기회를 접하다.

세계에 나가 다양한 기회를 접하다.

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‘ASML에서 일한다는 것

‘ASML에서 일한다는 것

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