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TWINSCAN XT:400L

365-nm Step and Scan

  • SMASH Sensor
  • Variable 0.65-NA 365-nm Projection Lens With Advanced Lens Manipulator And Imaging Enhancement Options
  • Dose Sum Check Feature
  • Extended Leveling Range
  • Improved Overlay TOP-2 for XT:400
  • Bridge Tool 200 mm - 300 mm

With the TWINSCAN XT:400L ASML introduces the next generation i-line Step and Scan system. In addition to increased productivity the XT:400L introduces new options to assist advanced applications with high topography (like 3D-NAND), and small CD and CDU (like critical layers in logic / analog application). Just like previous models the XT:400L is a dual-stage lithography tool designed for volume 200-mm and 300-mm wafers production down to 220-nm resolution.

The dual wafer stage technology of the TWINSCAN platform enables the exposure of one wafer and the alignment and mapping of the next wafer to take place in parallel, thereby virtually eliminating overhead time and allowing for continuous patterning of wafers. The level sensor, in combination with the TWINSCAN leveling approach, virtually eliminates differences between inner die and edge die and ensures high yield across the entire 300-mm wafer. Furthermore, new level strategies ensure that high level topographies are handled without problems. High throughput and yield are combined with fast reticle exchange times and Lot Streaming to provide the lowest cost of operation.

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Q3 Financial Results 2018

Q3 Financial Results 2018

ASML Holding N.V. will announce its 2018 Third Quarter Financial Results on Wednesday, October 17, 2018.

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Video Interview: CEO Peter Wennink Q2 Financial Results 2018

Video Interview: CEO Peter Wennink Q2 Financial Results 2018

Shareholder Meeting 2018

Finance

A look into ASML’s cleanroom

A look into ASML’s cleanroom

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The European Patent Office (EPO) recently recognized the groundbreaking R&D undertaken by ASML and its partners over the past 20 years. This article reflects on some of the most notable highlights…
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Annual Report 2017

Annual Report 2017

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Press

Q3 Financial Results 2018

Q3 Financial Results 2018

ASML Holding N.V. will announce its 2018 Third Quarter Financial Results on Wednesday, October 17, 2018.

Read More

Video Interview: CEO Peter Wennink Q2 Financial Results 2018

Video Interview: CEO Peter Wennink Q2 Financial Results 2018

Twitter live

ASML customer co-investment program

EUV: Questions and answers

EUV: Questions and answers

Investors

Q3 Financial Results 2018

Q3 Financial Results 2018

ASML Holding N.V. will announce its 2018 Third Quarter Financial Results on Wednesday, October 17, 2018.

Read More

Video Interview: CEO Peter Wennink Q2 Financial Results 2018

Video Interview: CEO Peter Wennink Q2 Financial Results 2018

Finance

Finance

Share Information

Year Overview - AEX

asml image
ASML share (15 min. delayed)
AEX:
NASDAQ:

Annual Report 2017

Annual Report 2017

ASML customer co-investment program

Select calendars:


Careers Calendar

Careers

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Careers Calendar

Twitter live

Jobs in San Diego

Jobs in San Diego

Our most recent vacancies are posted here on ASML.com.

Until the end of 2018, you will still find some San Diego jobs on our old careers site cymercareers.com.

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