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TWINSCAN XT:860M

248-nm Step and Scan

  • Variable 0.80-NA 248-nm 860+ Projection Lens
  • AERIAL II Illuminator
  • LithoGuide ILIAS
  • High-Speed Dual-Stage Technology
  • 40-W KrF Laser Technology With Variable Laser Frequency Control

The TWINSCAN XT:860M 248-nm Step-and-Scan system is a high-productivity, dual-stage KrF lithography tool designed for volume 300-mm wafer production at and below 110-nm resolution. Combining the imaging power of a variable 0.55–0.80-NA Carl Zeiss Starlith 860+ 4X reduction lens with AERIAL II and the optional QUASAR XL illuminator technology, the XT:860M extends volume proven KrF technology to 110-nm applications.

Highly line-narrowed 40-W KrF lasers with variable frequency control, in combination with the high optical transmission of the optical system, provide a production throughput of 240 300-mm wph with the lowest possible cost of operation.

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Investor Day 2018

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A look into ASML’s cleanroom

A look into ASML’s cleanroom

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Video Interview: CFO Roger Dassen Q3 Financial Results 2018

Video Interview: CFO Roger Dassen Q3 Financial Results 2018

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Kids, tech is cool.
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On Thursday November 8, 2018, investors and financial analysts from around the world gathered at our headquarters in the Netherlands to get an update from our executives about ASML’s product…
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Annual Report 2017

Annual Report 2017

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EUV: Questions and answers

Video Interview: CFO Roger Dassen Q3 Financial Results 2018

Video Interview: CFO Roger Dassen Q3 Financial Results 2018

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Investors

Investor Day 2018

Investor Day 2018

Finance

Finance

Share Information

Year Overview - AEX

asml image
ASML share (15 min. delayed)
AEX:
NASDAQ:

Video Interview: CFO Roger Dassen Q3 Financial Results 2018

Video Interview: CFO Roger Dassen Q3 Financial Results 2018

Annual Report 2017

Annual Report 2017

ASML customer co-investment program

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Careers Calendar

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Jobs in San Diego

Jobs in San Diego

Our most recent vacancies are posted here on ASML.com.

Until the end of 2018, you will still find some San Diego jobs on our old careers site cymercareers.com.

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