AAA | Mobile | Help | 
  • PDF version
  • Printfriendly
  • Add to my favorites
  • Send to a friend
  • Add comments

TWINSCAN XT:860M

248-nm Step and Scan

  • Variable 0.80-NA 248-nm 860+ Projection Lens
  • AERIAL II Illuminator
  • LithoGuide ILIAS
  • High-Speed Dual-Stage Technology
  • 40-W KrF Laser Technology With Variable Laser Frequency Control

The TWINSCAN XT:860M 248-nm Step-and-Scan system is a high-productivity, dual-stage KrF lithography tool designed for volume 300-mm wafer production at and below 110-nm resolution. Combining the imaging power of a variable 0.55–0.80-NA Carl Zeiss Starlith 860+ 4X reduction lens with AERIAL II and the optional QUASAR XL illuminator technology, the XT:860M extends volume proven KrF technology to 110-nm applications.

Highly line-narrowed 40-W KrF lasers with variable frequency control, in combination with the high optical transmission of the optical system, provide a production throughput of 240 300-mm wph with the lowest possible cost of operation.

Home

Shareholder Meeting 2019

Finance

Investor Day 2018

Investor Day 2018

A look into ASML’s cleanroom

A look into ASML’s cleanroom

Share Information

Year Overview - AEX

asml image
ASML share (15 min. delayed)
AEX:
NASDAQ:

Video Interview: CFO Roger Dassen Q1 Financial Results 2019

Video Interview: CFO Roger Dassen Q1 Financial Results 2019

Annual Report 2018

Annual Report 2018

Our Stories

Kids, tech is cool.
Society is facing an approaching global talent shortage as the job market struggles to keep up with the ever-increasing prevalence of technology. Tech companies play an important role in promoting…
Three key takeaways from ASML’s Investor Day 2018
On Thursday November 8, 2018, investors and financial analysts from around the world gathered at our headquarters in the Netherlands to get an update from our executives about ASML’s product…
All our stories

Select calendars:


Company Calendar

Press

Twitter live

Video Interview: CFO Roger Dassen Q1 Financial Results 2019

Video Interview: CFO Roger Dassen Q1 Financial Results 2019

EUV: Questions and answers

EUV: Questions and answers

Investors

Shareholder Meeting 2019

Finance

Investor Day 2018

Investor Day 2018

Select calendars:


Careers Calendar

Video Interview: CFO Roger Dassen Q1 Financial Results 2019

Video Interview: CFO Roger Dassen Q1 Financial Results 2019

Annual Report 2018

Annual Report 2018

Share Information

Year Overview - AEX

asml image
ASML share (15 min. delayed)
AEX:
NASDAQ:

Careers

チャンスをつかむのは自分次第です

チャンスをつかむのは自分次第です

Twitter live

ASMLで働くということ

ASMLで働くということ

Select calendars:


Careers Calendar

myPanels

Edit panels