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TWINSCAN XT:860M

248-nm Step and Scan

  • Variable 0.80-NA 248-nm 860+ Projection Lens
  • AERIAL II Illuminator
  • LithoGuide ILIAS
  • High-Speed Dual-Stage Technology
  • 40-W KrF Laser Technology With Variable Laser Frequency Control

The TWINSCAN XT:860M 248-nm Step-and-Scan system is a high-productivity, dual-stage KrF lithography tool designed for volume 300-mm wafer production at and below 110-nm resolution. Combining the imaging power of a variable 0.55–0.80-NA Carl Zeiss Starlith 860+ 4X reduction lens with AERIAL II and the optional QUASAR XL illuminator technology, the XT:860M extends volume proven KrF technology to 110-nm applications.

Highly line-narrowed 40-W KrF lasers with variable frequency control, in combination with the high optical transmission of the optical system, provide a production throughput of 240 300-mm wph with the lowest possible cost of operation.

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Q4 and FY Financial Results 2018

Q4 and FY Financial Results 2018

ASML Holding N.V. will announce its 2018 Fourth Quarter and Full Year Financial Results on Wednesday, January 23, 2019.

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Video Interview: CFO Roger Dassen Q3 Financial Results 2018

Video Interview: CFO Roger Dassen Q3 Financial Results 2018

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On Thursday November 8, 2018, investors and financial analysts from around the world gathered at our headquarters in the Netherlands to get an update from our executives about ASML’s product…
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Annual Report 2017

Annual Report 2017

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Investor Day 2018

Investor Day 2018

Shareholder Meeting 2018

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A look into ASML’s cleanroom

A look into ASML’s cleanroom

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Q4 and FY Financial Results 2018

Q4 and FY Financial Results 2018

ASML Holding N.V. will announce its 2018 Fourth Quarter and Full Year Financial Results on Wednesday, January 23, 2019.

Read More

Video Interview: CFO Roger Dassen Q3 Financial Results 2018

Video Interview: CFO Roger Dassen Q3 Financial Results 2018

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ASML customer co-investment program

EUV: Questions and answers

EUV: Questions and answers

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Q4 and FY Financial Results 2018

Q4 and FY Financial Results 2018

ASML Holding N.V. will announce its 2018 Fourth Quarter and Full Year Financial Results on Wednesday, January 23, 2019.

Read More

Video Interview: CFO Roger Dassen Q3 Financial Results 2018

Video Interview: CFO Roger Dassen Q3 Financial Results 2018

Annual Report 2017

Annual Report 2017

ASML customer co-investment program

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Careers Calendar

Investor Day 2018

Investor Day 2018

Finance

Finance

Share Information

Year Overview - AEX

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ASML share (15 min. delayed)
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세계에 나가 다양한 기회를 접하다.

세계에 나가 다양한 기회를 접하다.

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‘ASML에서 일한다는 것

‘ASML에서 일한다는 것

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