AAA | 
  • PDF version
  • Printfriendly
  • Add to my favorites
  • Send to a friend
  • Add comments

YieldStar S-1375F

  • Increased Sampling
  • Accuracy and Process Robustness

The YieldStar S-1375F is a stand-alone metrology system that measures in-device overlay and CD for after-etch applications.

By utilizing the YieldStar S-1375F's unique high-NA system, customers can measure device overlay and CD with speed and accuracy. This capability enables hyper dense sampling and faster feedback of after-etch data to the TWINSCAN and etchers.

Careers

James Liu, System Install Engineer

James Liu, System Install Engineer

careervideo

careervideo

Read More

Twitter live

Corporate culture

Corporate culture

ASML “創新導向”文化:不斷征服挑戰並維持技術領先優勢。
Corporate Culture

Select calendars:


Careers Calendar

myPanels

Edit panels