AAA | Mobile | Help | 
  • PDF version
  • Printfriendly
  • Add to my favorites
  • Send to a friend
  • Add comments

TWINSCAN™

With two stages for non-stop parallel processing, the TWINSCAN platform leads the way in productivity, performance and precision.

When it was launched in 2000, the TWINSCAN lithography platform caused a revolution. Today, it is the de facto standard for volume manufacturing on 300-mm wafers. Its unique dual-stage design allows non-stop parallel processing: measuring one wafer while imaging another for maximum accuracy and productivity.

Designed with flexibility in mind, the TWINSCAN platform is based on a modular architecture. So you can tailor your system to your specific needs, adding productivity and performance enhancements as your process requirements change.

The TWINSCAN range covers the entire advanced manufacturing spectrum. At each technology step, you'll find the right tool for the job. And our continuous innovation means new tools become available at the right time.

At the top of the range are the TWINSCAN NXT:1950i and TWINSCAN XT:1950Hi ArF immersion systems, featuring our HydroLith immersion technology. Taking full advantage of the TWINSCAN dual-stage architecture, the systems "measure dry, expose wet". This gives you all the benefits of immersion lithography while maintaining the TWINSCAN platform's renowned measurement accuracy.

Both systems push water-based immersion to its limits. Their hyper NA of 1.35 delivers unrivalled depth of focus and resolution, enabling high-yield manufacturing at smaller nodes than ever before.

For the TWINSCAN XT:1950Hi, that means production at the 38-nm half node with throughputs up to 148 wafers per hour. Meanwhile, the TWINSCAN NXT:1950i's super-fine overlay and throughputs greater than 175 wafers per hour also support double patterning and make it a cost-effective solution for the 32-nm node and beyond.

But TWINSCAN innovation isn't limited to ArF immersion technology. The TWINSCAN range also features ultra-high-productivity KrF scanners providing cost-effective solutions for mid-critical layers, and i-line scanners that deliver top-of-the-range value and performance.

From ArF immersion to i-line, TWINSCAN innovation delivers more "good die per day", lower cost of ownership and ever-increasing returns on your investment.

Home

Investor Day 2018

Investor Day 2018

Shareholder Meeting 2018

Finance

A look into ASML’s cleanroom

A look into ASML’s cleanroom

Share Information

Year Overview - AEX

asml image
ASML share (15 min. delayed)
AEX:
NASDAQ:

Video Interview: CFO Roger Dassen Q3 Financial Results 2018

Video Interview: CFO Roger Dassen Q3 Financial Results 2018

Our Stories

Kids, tech is cool.
Society is facing an approaching global talent shortage as the job market struggles to keep up with the ever-increasing prevalence of technology. Tech companies play an important role in promoting…
Three key takeaways from ASML’s Investor Day 2018
On Thursday November 8, 2018, investors and financial analysts from around the world gathered at our headquarters in the Netherlands to get an update from our executives about ASML’s product…
All our stories

Annual Report 2017

Annual Report 2017

Select calendars:


Company Calendar

Press

ASML customer co-investment program

EUV: Questions and answers

EUV: Questions and answers

Video Interview: CFO Roger Dassen Q3 Financial Results 2018

Video Interview: CFO Roger Dassen Q3 Financial Results 2018

Twitter live

Investors

Investor Day 2018

Investor Day 2018

Finance

Finance

Share Information

Year Overview - AEX

asml image
ASML share (15 min. delayed)
AEX:
NASDAQ:

Video Interview: CFO Roger Dassen Q3 Financial Results 2018

Video Interview: CFO Roger Dassen Q3 Financial Results 2018

Annual Report 2017

Annual Report 2017

ASML customer co-investment program

Select calendars:


Careers Calendar

Careers

세계에 나가 다양한 기회를 접하다.

세계에 나가 다양한 기회를 접하다.

Select calendars:


Careers Calendar

Twitter live

‘ASML에서 일한다는 것

‘ASML에서 일한다는 것

Corporate Culture

Jobs in San Diego

Jobs in San Diego

Our most recent vacancies are posted here on ASML.com.

Until the end of 2018, you will still find some San Diego jobs on our old careers site cymercareers.com.

myPanels

Edit panels