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Weiming Ren
A leading authority on e-beam inspection systems
“My philosophy for both work and life: I always try to find out the fundamental reasons behind a problem. The first step is to solve the problem quickly – the next is to improve the solution to the best degree possible."
Originally educated in photon optics, Weiming Ren has become a renowned expert in electron optics. She is considered ASML’s leading authority on single- and multi-beam electron optics design.
She has made many contributions to ASML-HMI’s wide-field optics, which in turn enabled the shipment of the first multi-beam e-beam system inspection system to ASML’s customers in 2020.
Get to know Weiming
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Joined HMI in 2007, with ASML since 2016
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Named a Fellow in 2018
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Based in San Jose, United States
Key contributions
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Design of electron optics in inspection and metrology e-beam tools
Expertise
Electron optics design, e-beam metrology and inspection
Patents
Holds 52 US patents across 56 ASML patent families
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