Weiming Ren, ASML Fellow

Weiming Ren

A leading authority on e-beam inspection systems

“My philosophy for both work and life: I always try to find out the fundamental reasons behind a problem. The first step is to solve the problem quickly – the next is to improve the solution to the best degree possible."

Originally educated in photon optics, Weiming Ren has become a renowned expert in electron optics. She is considered ASML’s leading authority on single- and multi-beam electron optics design.


She has made many contributions to ASML-HMI’s wide-field optics, which in turn enabled the shipment of the first multi-beam e-beam system inspection system to ASML’s customers in 2020.

Get to know Weiming
  • Joined HMI in 2007, with ASML since 2016
  • Named a Fellow in 2018
  • Based in San Jose, United States


Key contributions

  • Design of electron optics in inspection and metrology e-beam tools


Electron optics design, e-beam metrology and inspection



Holds 52 US patents across 56 ASML patent families