“When a problem arises, we sometimes just don’t want to admit it. Finding a solution starts with recognizing there’s an issue, and trying to fully understand it.”
Throughout his career, Marco has made a name for himself at the forefront of electron beam (e-beam) technology. He co-founded Mapper Lithography straight out of university, acting as Chief Technology Officer and lead engineer in designing and realizing their e-beam lithography system. At ASML, Marco uses his expertise and experience to accelerate our HMI e-beam metrology and inspection systems – particularly through the development of multibeam systems.
Customers and colleagues value his deep understanding, power to innovate and ability to communicate clearly. These skills were strongly in evidence in the successful demonstration of a new inspection system that uses thousands of electron beams simultaneously. As such, his innovation is expected to have a profound and lasting impact on wafer inspection and metrology.
Get to know Marco
- Co-founded Mapper in 2000, with ASML since 2019
- Named a Fellow in 2020
- Named a Senior Fellow in 2026
- Based in Delft, the Netherlands
Key contributions
- Co-founder and CTO of Mapper, acquired by ASML in 2019
- Pioneering MEMS-based electron optics for massively parallel e-beam systems
- Realizing an e-beam inspection system with thousands of beams
Expertise
Electron lithography and metrology
Patents
Holds 195 US patents (granted or pending) across 118 ASML patent families
