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Marco Wieland
Accelerating ASML HMI e-beam metrology and inspection systems
“When a problem arises, we sometimes just don’t want to admit it. Finding a solution starts with recognizing there’s an issue, and trying to fully understand it.”
Marco Wieland was the co-founder and Chief Technology Officer of MAPPER. He was the leading engineer designing and realizing their e-beam lithography system.
At ASML, Marco uses his e-beam system knowledge and experience to accelerate ASML’s HMI e-beam metrology and inspection systems.
Get to know Marco
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Co-founded Mapper in 2000, with ASML since 2019
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Named a Fellow in 2020
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Based in Delft, the Netherlands
Key contributions
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Co-founder and CTO of Mapper, acquired by ASML in 2019
Expertise
Electron lithography and metrology
Patents
Holds 62 US patents across 73 patent ASML families
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