NXE3400 metrology

Metrology & inspection systems

Delivering speed and accuracy, our metrology and inspection portfolio covers every step of the manufacturing process, from R&D to mass production.

Together with our computational lithography and patterning control software solutions, our metrology and inspection portfolio helps chipmakers achieve the highest yield and best performance in mass production.

YieldStar optical metrology

Our YieldStar optical metrology solutions can quickly and accurately measure the quality of patterns on the wafer.

E-beam metrology and inspection

Our HMI e-beam solutions help to locate and analyze individual chip defects amid millions of printed patterns.