Together with our computational lithography and patterning control software solutions, our wafer metrology and inspection portfolio helps chipmakers achieve the highest yield and best performance in mass production of semiconductor chips.
YieldStar optical metrology
Our YieldStar optical metrology solutions for the semiconductor industry can quickly and accurately measure the quality of patterns on a wafer.
YieldStar 1385Fast, accurate optical metrology of in-device overlay for post-etch process monitoring
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YieldStar 1390The standalone optical metrology system offers increased throughput for post-etch process monitoring.
YieldStar 500The YieldStar 500 is a stand-alone optical wafer metrology system for measuring pre-etch overlay leveraging ASML’s innovative TWINSCAN stage.
E-beam metrology and inspection
Our HMI e-beam solutions help to locate and analyze individual chip defects amid millions of printed patterns.
