Chemistry | Material Science Graduation Internship: Reuse of waste TMAH

Introduction

Our vision at ASML is to enable groundbreaking technology that solves some of humanity’s toughest challenges. We believe that increasing digitalization opens the way to a society that is more environmentally and socially sustainable. However, the benefits our industry brings to society come at the cost of considerable energy and resource use. We are therefore committed to looking closely at our impact on the environment and communities where we are based.
 

The Process Competences team at Corporate Real Estate (CRE) consists of 7 chemical engineers. We are the functional owner of critical assets at ASML, Veldhoven such as process gases, chemicals, ultra-pure water, pre-vacuum systems etc. The team provides crucial input into strategic roadmaps and masterplans necessary to ensure a safe, reliable and sustainable operation of assets. One of our key focus areas is to drive the advancement of sustainable and efficient chemical processes by researching, developing, and implementing cutting-edge technologies that minimize environmental impact, and enhance the overall performance and safety of industrial processes for Electrolyzers, hydrogen recovery and reuse, fuel cells, waste piranha acid reuse etc. Through continuous innovation, collaboration, and leveraging emerging technologies, we aim to lead the industry in having zero waste from operations to landfill or incineration by 2030 and thereby contribute to a more sustainable future.
 

Your assignment

TMAH (Tetramethylammonium Hydroxide), a highly alkaline aqueous solution, is widely used in the semiconductor industry for several key reasons, primarily in photolithography and etching processes:

• Photoresist Developer: TMAH is commonly used as a developer for positive photoresists. When exposed to light during photolithography, the photoresist undergoes a chemical change. TMAH helps remove the exposed areas of the photoresist, leaving behind a pattern that can then be used for etching or deposition.

• ​Etching: TMAH is also utilized in wet etching processes, particularly for the selective removal of materials like silicon dioxide. It acts as an etchant, reacting with the material to create a desired pattern on the wafer.
   

Our goal is to treat and reuse the waste TMAH generated from the above processes. As part of the Process Competences team, you will play the leading role in assessing the feasibility of reusing waste TMAH. You will analyse the impurities present in waste TMAH, perform a literature and scouting study into different purification methods. Working alongside the users and other ASML colleagues, you’ll combine research, analysing data, interviews, and brainstorming to generate fresh insights and breakthrough solutions. Eventually, you will provide documentation on your findings and on how to implement the purification process at ASML (if the process is feasible).

This study will be a combination of practical and theoretical work. However, please note that the practical aspects of this internship cannot be performed at ASML and therefore shall be done at the university.
 

Your profile

• Are a master student in Material Science, Chemistry or Chemical Engineering;

• Have strong affinity with Chemical Reaction Engineering, Process Technology and Materials Chemistry;

• Have experience with working in a lab environment;

• Have strong analytical skills and are solution-driven;

• Have good communication skills in English.
   

This is a master graduation project for 5 days per week, for minimum 6 months (preferably 9 months). The start date of this internship is September 2025.
 

Other requirements you need to meet:

• You are enrolled at an educational institute for the entire duration of the internship;

• Attach your cover letter with a clear motivation why you are interested in this internship assignment in particular;

• You need to be located in the Netherlands to be perform your internship. In case you ‘re currently living/studying outside of the Netherlands, your CV/motivation letter includes the willingness to relocate.

• If you are a non-EU citizen, studying in the Netherlands, your university is willing to sign the documents relevant for doing an internship (i.e., Nuffic agreement).
   

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

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