Physics | mathematics internship: machine calibration algorithms

Introduction

ASML is the world's leading manufacturer for semiconductor lithography machines, that are used to produce computer chips for both logic and memory. Our cutting edge technology is key to powering not just the current, but also the next generation of electronic devices. Metrology is a critical part of the lithography process, which involves measurement and characterization of various components and processes involved during chip production. Our advanced metrology techniques include high-precision sensors coupled to complex software algorithms, which enable accurate and reliable sub-nanometer measurements of critical parameters such as overlay, focus and critical dimension.

Within metrology the "SPM and Grid setup department" focusses on using interferometer and on wafer measurement to calibrate specialized lithography tools to within required accuracy.

Your assignment

Grid calibrations use various fitting methods to accurately determine corrections for the position-dependent errors. The goal of the assignment is to investigate performance of grid calibrations using a fitting method different than the currently used state-of-the-art model.

The assignments consists of the following tasks:

• Understand the state-of-the-art fitting methods and filtering algorithms used in grid calibrations and elsewhere.

• Select and implement a new algorithms in a selected grid calibration and add them to existing libraries.

• Investigate impact of the new fitting method on calibration's performance using complex simulation chains mimicking machine behavior.

• Visualize, share & present results in a structured and concise manner. Highlighting findings and potential future investigation parts.

Your profile

To be a match for this internship you:

• Are a final-year bachelor or a master student in Mathematics, Physics, Computer Science, Engineering or a related field.

• Have strong mathematical affinity and familiarity in subjects such as linear algebra and functional analysis.

• Have scientific programming experience in a high level language (MATLAB, Python, Julia). Experience with version control platforms such as GitHub (nice-to-have)

• Take initiative to investigate and/or problem solve independently.
  Is eager to learn and fascinated by technical challenges.

• Have strong communication skills and are fluent in English (verbal and written).

This is a final-year bachelor or a master apprentice internship for 6 to 12 months, for 3 to 5 days per week (at least 3 days onsite for full-time). The start date of this internship is September 2025.

Other requirements you need to meet

• You are enrolled at an educational institute for the entire duration of the internship;

• You are located in the Netherlands to perform your internship. In case you are currently living/studying outside of the Netherlands, your CV/motivation letter includes the willingness to relocate;

• If you are a non-EU citizen, studying in the Netherlands, your university is willing to sign the documents relevant for doing an internship (i.e., Nuffic agreement).

This position requires access to controlled technology, as defined in the United States Export Administration Regulations (15 C.F.R. § 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with candidates who are immediately eligible to access controlled technology.

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

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