Physics | Mechanical Engineering internship: vapor chambers for laser mirrors

Introduction

For the CO2 laser beam transport system, on the EUV source, the mirrors heat up because a fraction of the laser power is absorbed by each mirror. This causes thermo-mechanical deformation of the mirror surface which results in opto-mechanical drifts of the laser beam, despite the current water cooling concept on the backside of the mirror. 
 

Your Assignment

The goal of this assignment is to study and develop a solution using vapor chambers between the optical surface and the cooling body in order to effectively spread the heat from the localized hotspot to the cooling area. This will reduce the thermal gradients over the optical surface leading to a reduction of the opto-mechanical drifts. Vapor chambers are commonly used on high heat flux integrated Circuits (ICs) like CPU or GPUs to spread the heat towards a much larger heat sink.
 

The main tasks of this internship include:

• Research existing literature on vapor chamber applications;

• Identify their suitability for this high-power application and the desired temperature range;

• Make use of simulation tools (e.g. FEM - Ansys/Comsol): modeling of thermal, mechanical and optical performance;

• Communicate with supplier(s): e.g. providing specifications (thermal/mechanical/optical) for this application;

• Document and present the results and findings.

This is a Master apprentice internship for 4 to 6 months, 4-5 days per week. The start date of this internship is as soon as possible.

Your profile

To be a fit for this assignment, you:

• Are busy with your Master's in Mechanical Engineering, Thermal Engineering, or Physics;

• Have an affinity with Multiphysics;

• Are skilled in FEM - Ansys or Comsol;

• Are proactive and self-propelling;

• Possess good collaboration and problem-solving skills;

• Have good communication skills in English (verbal and written).

Other requirements you need to meet:

• You are enrolled at an educational institute for the entire duration of the internship;

• You are located in the Netherlands to perform your internship. In case you are currently living/studying outside of the Netherlands, your CV/motivation letter includes the willingness to relocate;

• If you are a non-EU citizen, studying in the Netherlands, your university is willing to sign the documents relevant for doing an internship (i.e., Nuffic agreement).

This position requires access to controlled technology, as defined in the United States Export Administration Regulations (15 C.F.R. § 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with candidates who are immediately eligible to access controlled technology.

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

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