Physics internship: modeling of alignment marks

Introduction

The Business line Applications provides integrated solutions with computational metrology and control technology for extendibility and improved efficiency of lithography products. Within Development & Engineering of the Business Line Applications, the Alignment Performance and Integration group (Align P&I) is part of the Process Window Control (PWC) Alignment department. The group is responsible for the development of wafer fab applications that optimize the alignment between layers on product wafers of our customers in order to improve overlay performance, where alignment is considered in a holistic sense with constituents such as wafer fab environment and way of working, sensors, algorithms and supporting SW applications. The Align P&I group is a team of 26 highly engaged and motivated people, that value open communication and informal interaction.

Your assignment

Alignment accuracy is highly impacted by asymmetries of alignment markers induced by processing. A promising method is to use physics-based process modeling to predict the impact and optimize the alignment marker design accordingly. In general, you will be contributing to developing, calibrating and validating the physics-based process models, which will be used to simulate and understand the process impact on alignment. Together with the team, you will also help to develop a solver which can be used for numerical optimization of inverse problem. Running simulations on HPC (High Performance Computing) is also a part of the assignment. At last, you will document and present the learnings to ASML internal stakeholders.

Your Profile

To be a perfect match for this internship, you:

• Are a Bachelor or Master student in physics, mathematics or a related study.

• Are familiar with semiconductor processing technology and have knowledge in method or algorithm for solving an inverse problem (nice to have).

• Have a strong understanding of the MATLAB programming language.

• Have strong problem solving skills and mindset together with the ability to take initiative.

• Have great communication skills and you are a demonstrated team player.

​This is a Bachelor or Master internship with a duration of a minimum of 6 months, for 4-5 days a week, starting as soon as possible.

Other requirements you need to meet

• You are enrolled at an educational institute for the entire duration of the internship;

• You are located in the Netherlands to perform your internship. In case you are currently living/studying outside of the Netherlands, your CV/motivation letter includes the willingness to relocate;

• If you are a non-EU citizen, studying in the Netherlands, your university is willing to sign the documents relevant for doing an internship (i.e., Nuffic agreement)

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

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