ASML selects 300 mm TWINSCAN as single platform at 193 nm wavelength

Press release - Veldhoven, The Netherlands, November 27, 2001

ASML Holding NV of the Netherlands (ASML) today announced that it will converge its 193 nm wavelength product offering onto a single platform, the TWINSCAN AT:1100, the industry's first high-productivity, dual-stage ArF (193 nm) lithography system for 300 mm wafer processing with 100 nm resolution.


ASML will discontinue before year-end the development and shipment of its Micrascan V product, a 193 nm wavelength system acquired through the company's merger in May 2001 with the Silicon Valley Group, Inc. The company will extend TWINSCAN manufacturing competencies and certain R&D programs from the Netherlands to the Wilton, Connecticut, facility to optimize ASML's industrial base in the United States.


Doug Dunn, ASML's President and CEO, said: "Our decision was made after close consultation with customers and we expect to ship our TWINSCAN AT:1100 product in early 2002 as a result of that. It is very important for ASML to concentrate our talent and leading edge technology on one platform, the industry standard TWINSCAN."


Developed for volume production applications, the 300 mm TWINSCAN AT:1100 is a 193 nm wavelength system with the industry's highest numerical aperture ArF lens. ASML has been the leading supplier of high numerical aperture 193 nm solutions to the industry since June 2001 through its 200 mm PAS 5500 Step & Scan platform. TWINSCAN features dual wafer stage technology that enables the exposure of one wafer and the alignment of the next wafer to take place in parallel, giving higher throughput and increased productivity.

About ASML

ASML is one of the world's leading providers of advanced technology systems for the semiconductor industry. The company offers an integrated portfolio of lithography, track and thermal systems mainly for manufacturing complex integrated circuits. Headquartered in Veldhoven, the Netherlands, ASML is traded on Euronext Amsterdam and Nasdaq under the symbol ASML. For the first half of 2001, the company reported net sales of over €1 billion. ASML employs approximately 8,000 people in 50 locations throughout the world. For more information, visit

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