Linear Technology buys PAS 5500/100D I-line steppers

ASML's Special Applications division (ASML SA) today announced it has received a multi-system order for PAS 5500/100DTM i-line steppers from Linear Technology Corp., a leading manufacturer of linear integrated circuits (ICs). The order's first phase, which calls for equipment to be installed at Linear Technology's facility in Camas, Washington, has been completed. Additional systems are scheduled for mid-year installation at Linear's wafer fab in Milpitas, California. This business marks the first order that ASML SA has received from Linear Technology.

"We believe this significant commitment from a first-time customer confirms that ASML SA's technology and dedication to customer support is being very well received in the marketplace," said Craig DeYoung, director of sales for ASML SA. "Linear Technology chose the PAS 5500/100D based on the advanced performance of the system – especially its resolution and alignment capability over thick, epitaxial layers."

DeYoung added that other factors in Linear Technology's decision were ASML SA's dedicated application support combined with the systems high productivity and extendibility for future and more advanced products.

"The PAS 5500/100D is the ideal stepper for linear IC production," said Lothar Maier, Linear Technology's vice president and chief operating officer. "Delivering high productivity, low cost of ownership and precision imaging technology for next-generation products, these tools provide a great fit for us as we expand our fabs and improve our advanced manufacturing capabilities."

ASML SA's PAS 5500/100D can print design rules as small as 0.35 micron by optimizing both depth of focus and resolution for critical process layers. Overlay is specified at <60 nm while processing 100 or more 150 mm wafers per hour.