SilTerra Malaysia Sdn. Bhd. selects ASML as litho supplier

Press release - Veldhoven, the Netherlands, March 8, 2000

Following an extensive evaluation of lithography suppliers, SilTerra Malaysia Sdn. Bhd. has chosen ASM Lithography (ASML) as the lithography supplier to equip Silterra's new all scanner-based semiconductor manufacturing facility, scheduled to be operational by the first quarter of 2001. Critical to the success of SilTerra's operations is the lithography tool performance. After extensive evaluation of the imaging technology and productivity performance for both i-line and deep UV, high numerical aperture (NA) scanner systems, SilTerra selected ASML's PAS 5500/400 i-line and PAS 5500/700 deep UV Step & Scan systems.

"ASML has demonstrated high productivity and critical layer imaging performance with their PAS 5500 scanners, which we require to provide the most advanced design rules, process capabilities and competitive pricing for our customers," stated K.C. Ang, vice president of operations for SilTerra.

The PAS 5500/700 deep UV scanner has the highest NA (0.70) available in the industry, and when combined with ASML's patented high-intensity AERIAL illuminator, provides high-volume throughput of 120 wafers per hour with production resolution of 150 nm. The PAS 5500/400 is the industry's first i-line Step & Scan system, optimized to match the PAS 5500/700 system, which allows manufacturers to use lower-cost i-line processes for less critical layers without sacrificing wafer throughput and factory productivity.

"The PAS 5500 technology platform has been recognized as a productivity benchmark by the world's leading foundry and memory IC manufacturers, where cost-effective operations are paramount to business success. We are pleased that SilTerra, after a very thorough evaluation, has recognized our technology leadership and chosen ASML as a key supplier for their business," stated Dave Chavoustie, ASML executive vice president of sales.

About SilTerra

Founded in December of 1997, SilTerra Malaysia Sdn. Bhd. is a full-service semiconductor manufacturing provider that offers customers with leading-edge process technologies. SilTerra's factory will be operational in the first quarter of 2001, ramping to 30,000 eight-inch wafers per month by 2002. SilTerra will have immediate access to LSI Logic's capacity on the license technologies to qualify and develop customers. SilTerra is headquartered in Kulim, Malaysia, with a sales and marketing office in Sunnyvale, California. Further information is available on the company's website at

About ASML

ASM Lithography, founded in 1984, is a world leader in advanced lithography systems that are essential to the fabrication of integrated circuits. ASML is publicly traded on both the Amsterdam Exchanges and on the Nasdaq Stock Market under the symbol ASML. Visit the company's website at for more information.

Contact information

  • Brittney Wolff Zatezalo
  • Corporate communications manager US
  • +14084833207