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Press release

ASML MaskTools names Dinesh Bettadapur president and chief executive officer

SANTA CLARA, California, July 11, 2001

ASML MaskTools today announced the appointment of Dinesh R. Bettadapur to the position of president and chief executive officer (CEO). In this role, Mr. Bettadapur is chartered with developing the overall strategy and running the operations for ASML MaskTools, a wholly owned subsidiary of leading lithography equipment supplier ASML. He succeeds Doug Marsh, who now serves as vice president of business integration and US institutional investor relations for ASML.


As president and CEO, Mr. Bettadapur is responsible for establishing ASML MaskTools as a leader in software imaging solutions for semiconductor manufacturing, especially as the industry strives to make masks and print wafers with continued high yields for advanced feature sizes measuring 100 nm and smaller. He brings more than a decade of semiconductor industry experience to his new role.


"Dinesh's appointment reflects ASML MaskTools commitment to focusing on the growth and maturation of our software business as the semiconductor industry continues to push the limits of optical lithography," said Doug Dunn, president and CEO of ASML.


"The company has assembled a world-class team and developed leading-edge optical extension technology and products," said Mr. Bettadapur. " I believe that ASML MaskTools is well positioned to provide comprehensive solutions to address the semiconductor industry's manufacturing at 100 nm and beyond."


Mr. Bettadapur worked for eight years at Intel before joining Monterey Design Systems, where he most recently served as executive vice president responsible for business operations. He holds a bachelor's degree in electrical engineering from Bangalore University and a master's degree in electrical engineering from Virginia Tech.

About ASML MaskTools


ASML MaskTools, Inc. is an ASML company based in Santa Clara, California. The company provides optical extension solutions to the semiconductor industry. These solutions are delivered through a variety of software and analytical products and through an experienced applications engineering team. Optical extension technologies enhance photolithography process latitude, thereby improving IC yields in manufacturing. These technologies are becoming essential as optical lithography is continuing to be used for volume IC manufacturing below the wavelength of the exposure light source. MaskTools and SoftScan are registered trademarks of ASML MaskTools. MaskRigger, EBView and LineSweeper are registered trademarks. LithoCruiser and DSM are trademarks.

Contact information

  • Brittney Wolff
  • Corporate communications manager US
  • +14084833207