ASML wins 300 mm business at Infineon Technologies with multiple TWINSCAN orders

Press release - Veldhoven, the Netherlands, June 5, 2001

Demonstrating growing global acceptance for its new 300 mm TWINSCAN lithography platform, ASML announced today that it has won a volume purchase order from Infineon Technologies AG (FSE/NYSE: IFX), one of the world's leading semiconductor companies. The first part of the order for multiple TWINSCAN systems, including KrF and ArF scanners, is valued at more than €50 million.

The delivery of the first systems from ASML's manufacturing site in Veldhoven, the Netherlands, is scheduled to ship this month to Infineon's SC300 world-leading 300 mm production fab for advanced memory ICs in Dresden, Germany. ASML's TWINSCAN platform, capable of handling both 300 mm and 200 mm wafers, incorporates fundamental innovations in system architecture and stage design to meet the highest productivity requirements. Using the proven imaging performance of Carl Zeiss Starlith optics, the system supports multiple generations of optical lithography from i-line to 157 nm. TWINSCAN uses a novel 'balance mass' system designed to effectively eliminate stage-induced system vibration, thereby increasing focus budgets and image contrast. Further improvements reduce sensitivity to environmental disturbances including temperature variations, thus helping to extend TWINSCAN's imaging to sub-100 nm design rules.

"We are pleased to expand our business partnership with Infineon, which has an installed base of our PAS 5500 systems at its fab in Richmond, Virginia," said Dave Chavoustie, ASML's executive vice president of sales. "This order demonstrates growing acceptance of our TWINSCAN technology for leading-edge 300 mm applications."

About ASML

ASML, founded in 1984, is leading company in advanced lithography tools, photoresist processing tracks and thermal systems that are essential in the fabrication of integrated circuits. The company is publicly traded on both the Euronext Amsterdam NV and on the Nasdaq Stock Market under the symbol ASML.

About Infineon

Infineon Technologies AG, Munich, Germany, offers semiconductor and system solutions for applications in the wired and wireless communications markets, for security systems and smart cards, for the automotive and industrial sectors, as well as memory products. With a global presence, Infineon operates in the US from San Jose, CA, in the Asia-Pacific region from Singapore and in Japan from Tokyo. In the fiscal year 2000 (ending September), the company achieved sales of €7.28 billion with about 29,000 employees worldwide. Infineon is listed on the DAX index of the Frankfurt Stock Exchange and on the New York Stock Exchange (ticker symbol: IFX). Further information is available at

Forward-looking statements

'Safe Harbor' Statement under the Private Securities Litigation Reform Act of 1995: Except for historical information, the matters discussed in this news release that may be considered forward-looking statements may be subject to certain risks and uncertainties that could cause the actual results to differ materially from those projected, including uncertainties in the market, pricing competition, procurement and manufacturing efficiencies, and other risks detailed from time to time in reports filed by the Company with the Securities and Exchange Commission. The Company assumes no obligation to update the information in this release.

Contact information

  • Brittney Wolff Zatezalo
  • Corporate communications manager US
  • +14084833207