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ASML MaskTools, Inc. today announced that Macronix International Co., Ltd., a leading Taiwanese semiconductor manufacturer, has purchased its MaskRigger product for widespread usage. Macronix will use MaskRigger to perform production optical proximity correction (OPC) treatment across multiple generations of specialized memory devices.
"We are very pleased to be working with a leading company such as Macronix in implementing solutions for their OPC needs. Their adoption of our MaskRigger product supports the growing recognition of the depth and breadth of our optical extension technology," said Dinesh Bettadapur, president and CEO of ASML MaskTools. "We were able to meet all of Macronix's unique requirements by delivering a customized and complete solution that demonstrates the most compelling value in the market place. MaskTools unique expertise in mask making and lithography, coupled with our patented scattering bar technology and a production-proven OPC product such as MaskRigger, convinced Macronix to make a decision in our favor."
About ASML
ASML is one of the world's leading providers of advanced technology systems for the semiconductor industry. The company offers an integrated portfolio of lithography, track and thermal systems mainly for manufacturing complex integrated circuits. Headquartered in Veldhoven, the Netherlands, ASML is traded on Euronext Amsterdam and Nasdaq under the symbol 'ASML'. In 2001, the company reported net sales of over €1.8 billion. ASML employs approximately 7,000 people in 50 locations throughout the world.
About MaskRigger
MaskRigger is a full-chip OPC production solution that adds sub-resolution assist features such as scattering bars, anti-scattering bars and serifs in the design layout, enabling improved depth-of-focus (DOF) and enlarged process latitude. In addition to OPC, MaskRigger fractures the design data into a read-to-write mask pattern file in a variety of formats such as MEBES Mode 5, Hitachi HL-800, Hitachi HL-950, and Toshiba VSB-11.
About ASML MaskTools
MaskTools, Inc. is a wholly owned subsidiary of ASML based in Santa Clara, California. The company offers leading edge optical extension technologies and products to the semiconductor industry. Core products include MaskRigger for full-chip OPC mask generation, and LithoCruiser for lithography process analysis and optimization. As optical lithography continues to be used for volume IC manufacturing below the wavelength of the exposure light source, these technologies enhance the photolithography process latitude thereby improving integrated circuit yields in manufacturing.
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