Macronix purchases ASML MaskTools MaskRigger product

ASML is one of the world's leading providers of advanced technology systems for the semiconductor industry. The company offers an integrated portfolio of lithography, track and thermal systems mainly for manufacturing complex integrated circuits. Headquartered in Veldhoven, the Netherlands, ASML is traded on Euronext Amsterdam and Nasdaq under the symbol 'ASML'. In 2001, the company reported net sales of over €1.8 billion. ASML employs approximately 7,000 people in 50 locations throughout the world.

MaskRigger is a full-chip OPC production solution that adds sub-resolution assist features such as scattering bars, anti-scattering bars and serifs in the design layout, enabling improved depth-of-focus (DOF) and enlarged process latitude. In addition to OPC, MaskRigger fractures the design data into a read-to-write mask pattern file in a variety of formats such as MEBES Mode 5, Hitachi HL-800, Hitachi HL-950, and Toshiba VSB-11.

MaskTools, Inc. is a wholly owned subsidiary of ASML based in Santa Clara, California. The company offers leading edge optical extension technologies and products to the semiconductor industry. Core products include MaskRigger for full-chip OPC mask generation, and LithoCruiser for lithography process analysis and optimization. As optical lithography continues to be used for volume IC manufacturing below the wavelength of the exposure light source, these technologies enhance the photolithography process latitude thereby improving integrated circuit yields in manufacturing.