SMIC selects multiple i-line and deep UV Step & Scan systems from ASML

SMIC ordered deep UV and i-line Step & Scan systems from ASML initially to begin to fully equip its two foundry fabs in Shanghai. These first systems, already installed in one fab, mark the beginning of business transactions between the two companies.

The first commercial foundry in China, SMIC is expected to produce more than 85,000 wafers per month when it reaches full production, and bring current generation technology to provide its customers with a full turnkey integrated circuit solution. SMIC has plans to eventually expand its facility to more than six fabs in Shanghai and work with major semiconductor companies worldwide.

"We are pleased to acquire both the i-line and DUV scanners for our new foundry in Shanghai. ASML's proven products will certainly make our ramp-up job easier because our people are familiar with them," said Richard Chang, president and chief executive officer of SMIC.

"The selection of multiple systems by a first-time customer demonstrates the acceptance that we have earned in the emerging Chinese market," said Dave Chavoustie, executive vice president of sales for ASML. "ASML's Step & Scan systems deliver high productivity, low cost of ownership, and extendibility, making them tools of choice for versatile foundry operations." ASML maintains a service office and a bonded warehouse close to its customers in Shanghai, which provides SMIC with continuing after-sales support.