ASML, FOM/NWO, UvA/VU to establish institute for nanolithography

Press release - Veldhoven and Amsterdam, the Netherlands, June 27, 2013

ASML, the Foundation for Fundamental Research on Matter (FOM), the University of Amsterdam (UvA), the VU University Amsterdam and the Netherlands Organisation for Scientific Research (NWO) announce their intention to establish the Institute for Nanolithography (INL), which will conduct fundamental and applied research in areas that are key to unlocking innovation in the global semiconductor industry.

The initial research program of the INL will focus on physical and chemical processes that are key for future extensions of extreme ultraviolet (EUV) lithography. This technology is at the forefront of chip manufacturing and is indispensable for innovation in the global semiconductor industry. The institute is expected to make important contributions to semiconductor lithography, which is the key manufacturing technology for making the memory chips and processors in PCs, smartphones and tablets.

ASML will provide more than one third of the institute’s annual budget, investing roughly €30 million over 10 years. FOM and NWO will contribute €25 million over 10 years and UvA/VU will make a contribution of €12.5 million. The city of Amsterdam has committed €5 million as start-up funding. The institute is expected to benefit from the government incentive for public-private partnerships (TKI) and plans to raise €25 million from various other funding instruments such as European programs. The overall initiative amounts to €100 million for 10 years.

The institute will be launched in the third quarter of 2013 under the management of the FOM Institute AMOLF. By 2015, it will become an independent institute managed by FOM in collaboration with UvA and VU, and employ about 100 highly qualified scientists and staff, including professors, postdocs, PhD students, graduate students and technicians. The institute will be located at the Science Park Amsterdam, embedding the institute among other pioneering researchers in a stimulating environment for cooperating and exchanging ideas. The institute will be linked to the education programs of the joint science faculties of UvA and VU.

“Beyond our existing cooperation with universities and research institutes, ASML sees a need for long-term, fundamental research in nanolithography, which focuses not on making a concrete product, but on exploring technology options. This institute, with its broad research agenda, will expand the nanolithography knowledge network, contributing to innovation in the semiconductor industry,” said Martin van den Brink, ASML executive vice president and Chief Product and Technology Officer.

“The cooperation between entrepreneurs and researchers is crucial to stay at the top,” said Henk Kamp, Economic Affairs Minister of the Netherlands. “With this institute, ASML can take on the growing competition and further strengthen its global market position.”

“With this institute, we will give an important new impetus to the top sector policy in the Netherlands, aimed at increasing the impact of science on our technology base and economy. The brainstorm sessions scientists organized when preparing their proposals for this institute have already identified various research avenues, which have the potential to lead to new technology options. I am confident the institute will set an example for achieving a win-win situation for science and industry alike”, said Wim van Saarloos, director of FOM.

Jos Engelen, chairman of the Governing Board of NWO, adds: "This initiative complies with the ambition of NWO to engage in more longer-term public-private partnerships and to encourage private industry to increase its contribution to the funding of scientific research in our country. We are proud that ASML has sought this partnership with FOM/NWO."

The establishment of the new institute is conditional on contract negotiations between the partners.

About ASML

ASML is one of the world's leading providers of lithography systems for the semiconductor industry, manufacturing complex machines that are critical to the production of integrated circuits or chips. Headquartered in Veldhoven, the Netherlands, ASML is traded on Euronext Amsterdam and NASDAQ under the symbol ASML. ASML has 8,625 employees on payroll (expressed in full-time equivalents), serving chip manufacturers in more than 55 locations in 16 countries. More information about our company, our products and technology, and career opportunities is available on our website at


The Foundation for Fundamental Research on Matter (FOM) promotes, coordinates and finances fundamental physics research in the Netherlands and is part of the physics division of the Netherlands Organisation for Scientific Research (NWO, FOM’s annual budget is €99 million. AMOLF ( is one of the three research institutes of FOM, located in Science Park Amsterdam, and carries out research in the field of bioscience and nanotechnology. AMOLF is renowned for its ability to identify and initiate novel research areas of strategic importance for Dutch science and industry. The institute employs about 200 people including more than 100 PhD students and postdoctoral researchers. The Amsterdam bid for the INL was led and coordinated by AMOLF.

About NWO

The Netherlands Organisation for Scientific Research (NWO) is the national research council in the Netherlands. NWO promotes quality and innovation in science by selecting and funding the best research. NWO manages research institutes of national and international importance, contributes to strategic programming of scientific research and brings science and society closer together. Research proposals are reviewed and selected by researchers of international repute. More than 5,000 scientists can carry out research thanks to funding from NWO.

Forward-looking statements

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Contact information

  • Brittney Wolff Zatezalo
  • Corporate communications manager US
  • +14084833207