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The semiconductor industry is driven by affordable scaling, which is powered by ASML’s holistic lithography product portfolio
We provide our customers with everything they need – hardware, software and services – to mass produce patterns on silicon, allowing them to increase the value and lower the cost of a chip.
EUV lithography systems
Providing highest resolution in high-volume manufacturing, our extreme ultraviolet lithography machines are pushing Moore’s Law forward.
DUV lithography systems
Our deep ultraviolet lithography systems dive deep into the UV spectrum to print the tiny features that form the basis of the microchip.
Almost every lithography system that we’ve ever shipped is still in use at a customer fab. We refurbish ‘classic’ PAS 5500 and TWINSCAN lithography systems for a new life and a new purpose.
Metrology & inspection systems
Delivering speed and accuracy, our metrology and inspection portfolio covers every step manufacturing processes, from R&D to mass production.
ASML is pioneering this industry-leading technique, which minimizes the physical and chemical effects that interfere with the quality of a chip.
At ASML, the customer always comes first. With more than 5,000 customer support employees, including service engineers and applications specialists, we make sure our systems in our customers’ fabs are running smoothly.
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