Reporting on sustainable long‑term value creation
We are focused on creating sustainable long-term value for all our stakeholders and shaping a sustainable future. Our environmental, social and governance (ESG) sustainability strategy is based on the themes below that matter most to our organization and our stakeholders.
In the Sustainability statements of our annual report, we explain how we manage our most material impacts, risks and opportunities (IROs), including targets, performance, actions and resources, and how we look ahead. Alongside our double materiality assessment, this video illustrates how touchpoints throughout our value chain lead to the IROs we report on.

Energy efficiency and climate action
We aim to be greenhouse gas (GHG) neutral across our value chain by 2040
We aim to reduce our climate impacts, working closely with our partners and peers in the entire semiconductor value chain – in our own operations, together with our suppliers, in our customers’ production processes and through reducing the energy used by semiconductors in operation by enabling scaling.

Our 2025 progress
Net scope 1 and 2 CO₂e emissions
2024: 33 kt
2025 target: GHG neutral
Gross scope 1 and 2 CO₂e emissions
2024: 33 kt
2025 SBTi target: 45 kt
Net scope 3 CO₂e emissions
2024: 12.0 Mt
2040 target: GHG neutral
Scope 3 intensity in CO₂e (per €m gross profit)
2024: 0.83 kt
2025 SBTi target: 0.93 kt
Commitment from top-80% suppliers (based on CO₂e emissions) to reduce their CO₂e footprint by 2030
2024: 17%
2026 target: 75%
NXE energy use per wafer pass (NXE:3800E, measured in 2025)
2024: 5.9 kWh
2025 target: 5.1 kWh
Circular economy
We aim to have zero waste from our operations to landfill and incineration by 2030
We aim to minimize resource inflows and waste outflows, to generate business value and avoid negative impacts on the planet.

Our 2025 progress
Total waste from operations (excluding construction and demolition waste)
2024: 13,267 t
2025 target: N/A
Waste generated per €m revenue (excluding construction and demolition waste)
2024: 469 kg
2025 target: 322 kg
Recycling rate (excluding construction and demolition waste)
2024: 62%
2025 target: 65%
Reuse rate of parts returned from field and factory
2024: 88%
2025 target: 90%
Attractive workplace for all
We aim to attract and retain a healthy, diverse and engaged workforce
We strive to create a culture that empowers our workforce to deliver on our vision by ensuring people are proud to be part of ASML and are engaged with our ambitions.

Our 2025 progress
Employee engagement score (three-year rolling average)
2024: 78.9% vs. benchmark -2.1%
2025 target: >-2.0% vs. top 25% performing companies
Employee engagement score against benchmark 2025 -2.3%
Employee inclusion score (three-year rolling average)
2024: 82.4% on par vs. benchmark
2025 target: >-3.0% vs. top 25% performing companies
Employee inclusion score against benchmark 2025 -0.6%
Attrition rate
2024: 3.8%
2025 target: <7%
Gender diversity: % inflow of women (all job grades)
2024: 26%
2025 target: 24%
Gender diversity: % representation of women in job grade 13+
2024: 12%
2026 target: 14%
Gender diversity: % inflow of women to job grade 9+
2024: 30%
2025 target: 24%
Responsible value chain
We aim to prevent, mitigate and manage adverse environmental and human rights impacts in our value chain
We seek to work with value chain partners that are aligned with our values and committed to upholding international environmental and human rights standards.
Our 2025 progress
Responsible Business Alliance (RBA) self-assessment completed (in %)
2024: 91%
2025 target: 90%
Suppliers with overall high risk evaluated and follow-up agreed (in %)
2024: 100%
2025 target: 100%

Innovation ecosystem
We aim to build a thriving, multi-regional innovation ecosystem that helps solve some of humanity’s toughest challenges
We’re fostering innovation through collaboration and partnerships – where trust and knowledge-sharing serves as the foundation for long-term cooperation.
Our 2025 progress
Number of ESG-focused scaleup companies supported (cumulative in numbers)
2024: 13
2025 target: 14
Value of in-kind support for startups and scaleups
2024: €1.3m
2025 target: N/A

Valued partner in our communities
We aim to ensure that ASML and communities benefit from each other’s presence and support each other’s development
We believe we have a responsibility to be a positive contributor and valued partner to the communities in which we operate.
Our 2025 progress
Amount invested in communities (per employee), including employee giving
2024: €1,084
2025 target: €2,500
Total cost of volunteering
2024: €3.1m
2025 target: N/A

Governance
We aim to act on our responsibilities and anchor them across our entire business through integrated governance, engaged stakeholders and transparent reporting
We aim to integrate sustainability in our day-to-day operations, to help us deliver on our ESG sustainability mission and responsibilities. We depend on building strong, sustainable relationships with all our stakeholders.
We aim to be open and transparent, driving progress while building trust through our commitment to integrated reporting.

Our 2025 progress
Number of convictions for violation of anti-corruption and anti-bribery laws
2024: 0
2025 target: N/A
Employees completing the Code of Conduct training course
2024: 97%
2025 target: N/A
Employees understanding the main principles of our Code of Conduct and how to follow them
2024: —
2025 target: N/A
Number of severe human rights incidents
2024: 0
2025 target: N/A







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