Circular economy

Minimizing waste, maximizing resources

2021 year-end figures

305 kg

Waste generated per €m revenue


Material recycling rate


PAS 5500 systems still in use

(from total ever sold)


Value of parts re-used

The modular design of our products lets us extract the maximum value from the materials we use, and repurpose our products across their life cycles.

We believe the circular economy is vital to ensure the future success and competitiveness of the semiconductor industry. While continuously innovating, we also want to ensure the increasingly sustainable use of materials across our processes and value chain.

Extending product lifetime

Our refurbished products business refurbishes and upgrades our older lithography systems to a higher performance level to extend their lives. A well-maintained ASML lithography system can last for decades – almost every system we've ever shipped is still in use at a customer fab.

When older systems (such as the PAS 5500) are replaced by newer generations, they are refurbished and given a new lease of life in a fab producing less sophisticated chips (such as accelerometers or radiofrequency chips).

This approach supports our customers’ ambitions to extend the lifetime of their installed base and draw out the best value from their capital, while also underpinning our broader circular economy approach.

Infographic reduced waste

Reducing waste

Waste at ASML includes office waste, packaging waste, hazardous waste from the chemicals we use in our processes, as well as product waste (usually parts no longer needed after an upgrade or defective parts).

We have a range of initiatives to reduce and manage this waste, such as our Return4Reuse program, engagement with suppliers, site-specific reductions, and increasing material recycling. In 2019, we set an ambitious target of cutting our amount of waste per revenue by 50% by 2025. From 2019 to 2021, our total waste generated per €1 million reduced from 417 kg to 305 kg.

Accelerating re-use

We are committed to re-using parts, tools and packaging whenever possible in our value chain to reduce and prevent waste, reduce costs and accelerate learning. Working together with our customers and suppliers, we aim to remanufacture used system parts, re-using as if they were new parts and preventing unnecessary waste.

We accelerated our efforts in 2020 by establishing a cross-sector Re-use department, dedicated to driving material re-use on a global scale.

With an eye towards a more sustainable future, the department will increase our re-use efforts through their dedicated groups across ASML. The department will focus on extending the infrastructure for our repair centers on global scale, designing for re-use and creating a learning organization.

ASML Cleanroom EUV Wafer Stage Training

Circular economy initiatives

Embedding a circular economy approach in our way of working and thinking will enable us to meet our waste reduction goals and we already have a number of initiatives resulting in positive change.

the Return4Reuse program focuses on the reuse of materials used to pack and transport parts between the field and our factories. In 2021, over 4,300 tonnes of transportation materials were re-used, up from nearly 4,000 tonnes in 2020.

Our As-New program aims to prevent unnecessary waste by remanufacturing used system parts, which are then qualified to the same standard as new parts.

As-New SMASH system

Our As-New program aims to prevent unnecessary waste by remanufacturing used system parts, which are then qualified to the same standard as new parts.

The first As-New SMASH pilot was successfully built and shipped in mid-2020. The SMASH As-New project is an early pilot for our As-New program, helping to define what is needed to requalify a module.

SMASH is one of the advanced alignment sensors in our scanners. Following a second pilot, this project moved to high volume manufacturing in mid-2020.

ASML Cleanroom

Find out more about our sustainability strategy