Circular economy

Minimizing waste, maximizing resources

The modular design of our products allows us to extract the maximum value from the materials we use and repurpose our products across their life cycles.

While putting continuous effort into innovation, we also want to ensure the increasingly sustainable use of materials across our processes and value chain.

Extending system lifetime

As we move away from the linear ‘Take, Make, Dispose’ model, we believe the circular economy is vital to ensure the future success and competitiveness of the semiconductor equipment industry.


Our refurbished products business refurbishes and upgrades our older lithography systems to a higher performance level to extend their lives. We are able to upgrade our systems while they are in use ‘in the field’ thanks to their modular design.

A well-maintained ASML lithography system can last for decades, and almost every lithography system that we’ve ever shipped is still in use at a customer fab. Once older systems (such as the PAS 5500) are replaced by newer generations, they are refurbished and given a new lease of life in a fab where the manufacturer requires comparatively less sophisticated chips (such as accelerometers or radiofrequency chips).

Infographic reduced waste

Reducing waste

Waste at ASML includes office waste, packaging waste, hazardous waste from the chemicals we use in our processes, as well as product waste (usually parts no longer needed after an upgrade or defective parts).

We have a range of initiatives to reduce and manage this waste, such as our Return4Reuse program, engagement with suppliers, site-specific reductions, and increasing material recycling. In 2019, we set an ambitious target of cutting our amount of waste per revenue by 50% by 2025.

Circular economy initiatives

Embedding a circular economy approach in our way of working and thinking will enable us to meet our waste reduction goals and we already have a number of initiatives resulting in positive change.

For example, the Return4Reuse program focuses on the reuse of materials used to pack and transport parts between the field and our factories. In 2019, we reused around 1.5 million kg of materials, so preventing it from ending up as waste. Our As-new program aims to prevent unnecessary waste by remanufacturing used system parts, which are then qualified to the same standard as new parts.

Find out more about our sustainability strategy