Planet earth lighting up in darkness

Climate & energy

Taking every step to lower our footprint

2021 year-end figures
1,689 TJ

Energy consumption


Renewable electricity

39.4 kt

Net emissions footprint

(scope 1 & 2)

0.5 kt

Value chain emission intensity per €m revenue

(scope 3)

Climate change is a global challenge that requires urgent action by everyone, including us.

Our goal is to achieve net zero emissions. We're committed to decreasing our greenhouse gas emissions and reducing our carbon footprint across our operations as well as in our value chain, by enhancing the energy efficiency of our products and our property.

Energy efficiency of our products

We aim to invent, develop and manufacture our products in a more environmentally friendly way, striving to make sure that our products are manufactured and can be operated responsibly across their entire life cycle.


By 2025, we aim to reduce the energy use per wafer of our future-generation EUV NXE systems by 60% (compared to the NXE:3400). Our efforts in this area have resulted in energy use per exposed wafer pass reducing by 37%, as at 2021.


With our latest EUV systems now at the point of high-volume production, reducing their energy use is a priority for us, our customers and suppliers.

To achieve our efficiency goals, we need to overcome technical challenges that have no precedent anywhere in the world. Solving these challenges requires ongoing innovation and relies on increased collaboration with our customers, suppliers and knowledge institutions.

Net zero-emission operations

We are committed to minimizing our impact on the environment by improving our operational efficiency. Our strategy to achieve zero carbon emissions includes use of renewable electricity and reducing emissions in our value chain. In 2021, we expanded our environmental reporting scope from 20 locations – which covered around 90% of our worldwide CO2 emissions – to 57 locations which encompass more than 95%. Taking all these locations into account, the share of renewable electricity we used globally was 92% in 2021. In the Netherlands and the US, we achieved our goal of using 100% renewable electricity. The renewable market situation in Asia is complex and we continue to investigate options to meet our ambitions in this region as well.

drone shot of ASML building with solar panels

Bird's eye view of solar panel installation at our Veldhoven campus.

Our financial commitment to renewable projects that generate Guarantees of Origin (GO2) helps us achieve renewable electricity usage.


At ASML, we are reducing emissions by focusing on achieving energy savings through process optimization, cycle time reductions, and by optimizing our global real estate portfolio. As at 2021, our net emissions footprint is 39.4kt.

Working with our partners

We recognize that environmental impact goes beyond our operations to our partners in the value chain.

We encourage them to work with us in our effort to reduce greenhouse gas emissions in the industry as well as our company.

There's been good progress in this area with our logistics suppliers. In 2020, the first rail freight shipment from Veldhoven to Japan was introduced.

We manage the environmental impact of our activities through a strong governance structure and our ISO14001 certified management system.

Dutch ASML realizes new hydropower plant in Norway

Sandvik, one of the hydropower plants on the coast of Norway.

Sustainability in practice: Generating green electricity in Norway

Through our GO2 project, we have co-financed the construction of three small hydropower plants in the rugged countryside north and south of Bergen, Norway.

The Sandvik, Valdra and Nottveit installations are run-of-river power plants, which capture energy from fast-moving rivers and have a low local ecological impact. They generate 26,000 MWh of green energy per year, which is fed into the cable between Norway and the Netherlands.

Find out more about our sustainability strategy