Planet earth lighting up in darkness

Climate & energy

Reducing our climate impact

2023 performance

35.1 kt

Scope 1 & 2 CO2e emissions

15.0 Mt

Scope 3 CO2e emissions

1.06 kt

Scope 3 CO2e emissions intensity

(per €m gross profit)

7.7 kWh

NXE energy use per wafer pass

(NXE:3600D, measured in 2023)

Climate change is a global challenge that requires urgent action by everyone, including us.

Our goal is to achieve net zero emissions. We're committed to decreasing our greenhouse gas emissions and reducing our carbon footprint across our operations as well as in our value chain, by enhancing the energy efficiency of our products and our property.

UN Sustainability Goal

Toward net-zero emissions

Climate change is a global challenge that requires urgent action by everyone, including us. While the benefits our industry brings to society are considerable, these come at a cost, through the consumption of considerable energy and resources. We have identified energy management and carbon footprint as material topics for our business across three distinct areas – in our own operations, throughout our supply chain, and in the use of our products and downstream. As part of our climate action strategy, we aim to have:


Net zero greenhouse gas emissions in our operations (scope 1 and scope 2) by 2025

We aim to achieve our target for reducing emissions from our operations (scope 1 and 2) by reducing energy consumption, using renewable energy and compensating CO2 emissions.


Net zero greenhouse gas emissions from business travel and commuting (scope 3) by 2025

Our Access & Mobility (A&M) program is focused on developing sustainable commuting options, and we are working with employees to encourage, incentivize and support changing commuting habits. We offer a mix of options, including cycling incentives, free public transport, car-pooling and shuttle buses.

drone shot of ASML building with solar panels

Bird's eye view of solar panel installation at our Veldhoven campus.

Net zero greenhouse gas emissions in our supply chain (scope 3) by 2030

Recognizing that we depend on our suppliers, we encourage our value chain partners to work with us to jointly reduce our carbon footprint. Our Supplier Sustainability Program is a key enabler in our efforts to further reduce scope 3 emissions.


In addition to collaborating with our suppliers, we are also working to reduce the embedded carbon footprint of our system designs. To achieve this goal, we have started a Life Cycle Assessment (LCA) competence group. Results of the first pilot studies have recently become available.


Net zero greenhouse gas emissions from product use (scope 3) by 2040

We are one of the founding members of and active contributor to the Semiconductor Climate Consortium, founded in November 2022. We are focused on speeding up industry value chain efforts to reduce greenhouse gas emissions.

Product energy efficiency

We aim to invent, develop and manufacture our products in a more environmentally friendly way, striving to make sure that our products are manufactured and can be operated responsibly across their entire life cycle.

By 2025, we aim to reduce the overall energy consumption of our future-generation EUV systems by 10% compared with the 2018 baseline model (NXE:3400B), while increasing productivity. We have also set a target of reducing the energy consumption per exposed wafer by 60%, compared with the 2018 baseline (NXE:3400B). We believe we are on track to achieve these targets.

In 2022, we continued working on energy-efficiency improvements for future products, which require long lead times and take multiple years to achieve. Progress on these projects is monitored on a quarterly basis.

Working with our partners

We recognize that environmental impact goes beyond our operations to our partners in the value chain.

We encourage them to work with us in our effort to reduce greenhouse gas emissions in the industry as well as our company.

There's been good progress in this area with our logistics suppliers. In 2022, we made significant progress in our Supplier Sustainability Program, with the aim of joining forces with suppliers to achieve our goal of net zero emissions by 2030. We launched this program to our top 60 suppliers, and our goal is to gradually increase the scope over time.

Our environmental management system

We have an environmental management system (EMS) in place to help us monitor our energy use and emissions, improve performance and enhance efficiency. The EMS is integrated into our Environmental, Health and Safety (EHS) management system. All our facilities operate on the basis of this system, which is ISO 14001 certified and structured in accordance with ISO 45001 requirements.


Our key themes

Find out more about our sustainability strategy

An aerial view of buildings at ASML’s campus in Veldhoven, the Netherlands.

Building a sustainable campus

ASML has adopted sustainable construction standards to manage the environmental impact of our growing campuses.


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