Climate & energy

Taking every step to lower our footprint

We are reducing our carbon footprint. Our renewable energy strategy sets our ambition to achieve zero emissions across our operations.


While increasing productivity of our products, we are also working towards reducing the energy consumption of our products to enhance our energy efficiency.

Energy efficiency of our products


People across the world are using ever-more powerful and sophisticated devices, which drives demand for microchips. This in turn drives demand for our chip making systems to produce smaller, faster, cheaper, more powerful, and energy-efficient chips. We can only meet this demand by consistently and continuously advancing our technology. At the same time, we aim to invent, develop and manufacture our products in a more environmentally friendly way, striving to make sure that our products are manufactured and can be operated responsibly across their entire life cycle.

 In relation to our latest EUV systems, which are now at the point of high-volume production, we are exploring opportunities to achieve energy savings for these systems across the following areas:


  • Redesigning the pre-vacuum systems for our EUV systems in a manner that uses less energy.

  • Increasing the recycling rate of the hydrogen (H2) used in our systems, in partnership with our suppliers.

  • Exploring the opportunity of some electronics of the EUV system operating at higher temperatures.

  • Reducing the amount of energy used for cooling purposes in these systems at our customer sites.

Zero-emission operations

As ASML, we are committed to minimizing our impact on the environment by improving our operational efficiency. Our Sustainability Strategy is to achieve zero carbon emissions in our operations through the use of renewable electricity and reducing emissions in our value chain.


Our financial commitment to renewable projects that generate Guarantees of Origin (GO2) helps us achieve renewable electricity usage. For example, we recently invested in a 1MW hydropower project in Sandvik, Norway and a 3.5MW hydropower project in Skânevik, Norway.

Enhancing energy efficiency is another priority at ASML. Our ambition is to achieve energy savings through process optimization, by the provision of cycle time reductions and by optimizing our global real estate portfolio.