Arie den Boef, Senior Fellow at ASML

Arie den Boef

Taking ASML in new directions

"I really value the freedom ASML offers me. I try use it to start new opportunities and engage with customers, and to see whether it makes sense to take some of our activities in a new direction, and how."

Arie den Boef is Senior Fellow at ASML. He joined in 1997 as a system engineer. Since then, he has worked on phase modulation in alignment sensors, and has built up a reputation both within the company and among customers as an expert in metrology and in alignment, focus, and leveling systems. Arie is highly skilled at translating customer needs into inventions.

In 2016, he was appointed Professor of Metrology and Nanolithography at Vrije Universiteit Amsterdam. He delivers a graduate-level course on optical wafer metrology techniques and conducts research on the use of computational imaging techniques for metrology.

Get to know Arie
  • ASML employee since 1997

  • Named a Fellow in 2006

  • Named a Senior Fellow in 2017

  • Based in Veldhoven, the Netherlands

Key contributions


Optical sensors and their use by customers


Holds about 190 issued US patents across over 178 patent families

Lines of binary code algorithms on a blue background.

Learn more about Arie

ASML Fellow Arie den Boef developed YieldStar metrology and is now pioneering smart algorithms in imaging.

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