Arie den Boef, Senior Fellow at ASML

Arie den Boef

Sensing new ways forward

"There are so many metrology technologies emerging right now. It’s one of my favorite areas because the technologies are challenging, fun to work on and promise real value for our customer – and I am surrounded by such a great team."

Arie joined ASML as a system engineer. Now a Corporate Fellow at ASML, he has been making groundbreaking innovations in metrology continuously for more than 20 years. And in 2016, he was appointed part-time professor of metrology and nanolithography at Vrije Universiteit Amsterdam.


In this time, Arie has built a reputation among colleagues and customers as an expert in metrology, alignment, focus and leveling systems. He is recognized as a founding father of ASML’s YieldStar systems and continues to explore emerging trends in metrology. Arie is also hugely appreciated within ASML and beyond for his ability to translate customer needs into inventions and his mentoring skills.

Get to know Arie
  • ASML employee since 1997
  • Named a Fellow in 2006
  • Named a Senior Fellow in 2017
  • Named a Corporate Fellow in 2023
  • Based in Veldhoven, the Netherlands


Key contributions


Optical sensors and their use by customers



Holds 225 US patents across 149 ASML patent families

Learn more about Arie

ASML Fellow Arie den Boef developed YieldStar metrology and is now pioneering smart algorithms in imaging.


Lines of binary code algorithms on a blue background.