Simon Mathijssen, ASML Fellow

Simon Mathijssen

An expert in alignment and overlay metrology

“I am a problem solver. I like to work on complex problems, particularly in a challenging environment in which you have to take into account both technical and business considerations.”

With his excellent skills in physics and mathematics, Simon Mathijssen is a well-acknowledged authority in optics, optical sensors and their applications in semiconductor fabs.


He has worked intensively on breakthrough solutions in the field of wafer alignment and overlay, in close interaction with customers using ASML’s most advanced technology.

Get to know Simon
  • ASML employee since 2011

  • Named a Fellow in 2021

  • Based in Veldhoven, the Netherlands


Key contributions

  • Process robustness enhancements of alignment and overlay metrology

Expertise

Alignment and overlay metrology


Patents

Holds 47 US patents across 41 ASML patent families